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Environmental, Safety and Health Chapter Sprng 2009 Summary

Environmental, Safety and Health Chapter Sprng 2009 Summary. Jim Jewett – Intel Andreas Neuber – Applied Materials Harry Thewissen - NXP Tetsu Tomine – Seiko-Epson. ESH ITWG Jim Jewett. Spring 2009 Results. ESH Focus Matrix Table Added

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Environmental, Safety and Health Chapter Sprng 2009 Summary

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  1. Environmental, Safety and Health ChapterSprng 2009 Summary Jim Jewett – Intel Andreas Neuber – Applied Materials Harry Thewissen - NXP Tetsu Tomine – Seiko-Epson ESH ITWG Jim Jewett

  2. Spring 2009 Results • ESH Focus Matrix Table Added • Focus for ESH R&D on issues dispersed throughout the ITRS • Initial development of ESH “Driver/Metric” to identify ESH development in parallel to technology development of materials • Begin Preparation for Energy Discussion at Semicon West • Recognized Yield thrust contributions needing further development in areas of nano metrology and energy conservation • Reviewed ESH and ERM new material synergy relative to latest technology and policy requirements

  3. New Table: ESH Topical Matrix

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