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FNAL 65nm test structures TZ65 chip Fermilab CMS p ixels project March, 2013

FNAL 65nm test structures TZ65 chip Fermilab CMS p ixels project March, 2013. 65nm test structures (TZ65 chip). Submission in March 2013 (MOSIS run 03/25/2013) 2×6mm 2 ,divided in two parts Cost $83k ( expensive ) TSMC 65nm, 1P9M, 2MT 900Å, 14500 Å AP, No RV

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FNAL 65nm test structures TZ65 chip Fermilab CMS p ixels project March, 2013

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  1. FNAL 65nm test structuresTZ65 chipFermilabCMS pixels projectMarch, 2013

  2. 65nm test structures (TZ65 chip) Submission in March 2013 (MOSIS run 03/25/2013) 2×6mm2 ,divided in two parts Cost $83k (expensive) TSMC 65nm, 1P9M, 2MT 900Å, 14500Å AP, No RV • Design: Farah Fahim and AlpanaShenai • Open for sharing with institutions interested in: technology, hot carrier degradation and irradiation tests General comments • Submissions in 65nm every 2 weeks via MOSIS • Very efficient and professional technical support for TSMC 65nm provided by MOSIS, many questions generated • Troubles with understanding of DFM rules, verification: DRC and LVS run very slowly, upgrade of tools required, e.g. parasitics extraction CMS pixels project, March, 2013

  3. 65nm ½chip1 Gate1 even Gate2 even Gate3 even Gate4 even Gate5 even sub well Oscillator Out3 Oscillator Out2 Oscillator Out4 Oscillator Out1 Vddd! Vssd! Table of transistor sizes Oscillators 4 ring oscillators • With 923 inverting stages each with the following inverter sizes • PMOS 2u/60n; NMOS 1u/60n • PMOS 2u/130n; NMOS 1u/130n • PMOS 2u/200n; NMOS 1u/200n • PMOS 2u/300n; NMOS 1u/300n Gate2 odd Gate4 odd Gate5 odd Gate1 odd Gate3 odd Vddd! Vssd! CMS pixels project, March, 2013

  4. 65nm ½chip1 Oscillator1 Oscillator2 Oscillator3 schematics Oscillator4 G1odd G2odd G3odd G4odd G5odd G1even G2even G3even G4even G5even CMS pixels project, March, 2013

  5. 65nm ½chip2 CMS pixels project, March, 2013

  6. 65nm ½chip2 BlockA BlockB BlockB BlockC BlockC CMS pixels project, March, 2013

  7. 65nm ½chip2 details of BlockA schematics Nmos Transistors (nch) M1: .12/.06 M2: .24/.06 M3: .36/.06 M4: .48/.06 M5: .6/.06 M6: 1/.06 M4 M1 M2 M3 M5 M6 Nmos Transistors (nch) M7: 5/.5 M8: 5/5 M9: 2.05/.06 M10: 1.5/.3 M11: 2.24/.3 M12: .12/.06 M13: 5/.06 M11 M12 M7 M8 M10 M13 M9 CMS pixels project, March, 2013

  8. 65nm ½chip2 details of BlockBschematics NMOS Transistors (nch_25) M14: .4/.28 M15: .5/.28 M16: .8/.28 M17: 1/.28 M18: 5/.5 M19: 5/5 M20: 2.22/.28 M21:3.38/1.2 M22: .4/.28 M23: .8/.28 M24: 3.45/1.2 M14 M15 M16 M17 M18 M19 M20 M21 M22 M23 M24 PMOS transistors (pch) M25: .12/.06 M26: .36/.06 M27: .60/.06 M28: 1/.06 M29: 5/.5 M30: 10/10 M31: 5/5 M26 M28 M30 M25 M27 M31 CMS pixels project, March, 2013

  9. 65nm ½chip2 details of BlockCschematics PMOS Transistors (pch_25) M31: .4/.28 M32: .5/.28 M33: .8/.28 M34: 1/.28 M35: 5/.5 M36: 5/5 M36 M31 M35 M32 M33 M34 CMS pixels project, March, 2013

  10. 65nm ½chip2 Summary with size and number of Pads CMS pixels project, March, 2013

  11. Submitted layout Fermilab Institutional Review, June 6-9, 2011

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