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1 . T itle : N ano Particle Contamination Control in the Semiconductor Manufacturing Process

SEMINAR. 1 . T itle : N ano Particle Contamination Control in the Semiconductor Manufacturing Process 2. S peaker : D r. Jaein Jeong (Samsung Electronics ) 3. T ime : 1 6 :00 – 17:30, Thursday, December 13, 2007

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1 . T itle : N ano Particle Contamination Control in the Semiconductor Manufacturing Process

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  1. SEMINAR 1. Title : NanoParticle Contamination Control in the Semiconductor Manufacturing Process 2. Speaker : Dr. Jaein Jeong (Samsung Electronics ) 3. Time : 16:00 – 17:30, Thursday, December 13, 2007 4. Place : e+ Lecture Hall (room 83188), 2nd Research Building, Sungkyunkwan University 5. Summary : Nano-scale semiconductor devices play an important role to make human life better and memory device is a major technology driver in the semiconductor industry. However, with the shrinkage of the device’s feature size, nano particle contamination has emerged as a serious problem in the semiconductor manufacturing Fabs, which results in yield and productivity drop. In this seminar, the following issues concerning the challenge of nano particle contamination will be discussed; - The number of nano-sized particles deposited on the wafer surface rapidly increases while their removal efficiency decreases. - For the nano-size particle control, it is more important to understand the process reaction mechanism and to use proper defect inspection tools and methods. - It has to be studied on the advanced particle control technology from the development of new materials. - To control the particle generation on the process, continuous improvement for the process chamber and parts cleaning technology is needed. - To understand the particle formation in the process equipment, we have to develop the in-situ process diagnostic tools, such as ISPM and PBMS. 6 Background : Education 1997 Mechanical Engineering, Seoul National University, B.S 1999 Mechanical Engineering, Seoul National University, M.S 2002 Mechanical Engineering, Seoul National University, Ph.D Work Experience 2002-2004 Researcher, Institute of Advanced Machinery and Design 2004-2005 Senior Engineer, Samsung Corning Research Center 2005- Senior Engineer, Manufacturing Technology Team 2, Memory Division, Samsung, Semiconductor Business, Samsung Electronics 7. Questions : Professor Taesung Kim (☏ 031-290-7466) Sungkyunkwan University

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