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37 th IEEE PV Specialists Conference, Seattle, WA, June 19-24, 2011

PINHOLE DETECTION IN Si SOLAR CELLS USING RESONANCE ULTRASONIC VIBRATIONS (RUV). Ultrasonic Technologies, Inc. www.UltrasonicTech.com. Crack detection, process control, smart tools.

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37 th IEEE PV Specialists Conference, Seattle, WA, June 19-24, 2011

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  1. PINHOLE DETECTION IN Si SOLAR CELLS USING RESONANCE ULTRASONIC VIBRATIONS (RUV) Ultrasonic Technologies, Inc. www.UltrasonicTech.com Crack detection, process control, smart tools Yu. Emirov2, A. Belyaev1, D. Cruson1, I. Tarasov1, A. Kumar2, Hao Wu3, S. Melkote3, and S. Ostapenko1 1Ultrasonic Technologies, Inc., Wesley Chapel, FL USA, 2University of South Florida, Tampa, FL USA 3 Georgia Institute of Technology, Atlanta, GA, USA RUV: How It Works Activation Station: FEA pulling stress • Key components: • Transducer gives a frequency sweep; • Ultrasonic probe records resonance curve characteristics: (a) peak position, (b) amplitude and (c) bandwidth; • proprietary statistical algorithm gives ”accept-reject” command; • Robotic grippers provide load and unload (RUV-2.2) A schematic of RUV system for crack detection in PV wafers and cells Frequency sweeps: Green – normal wafer, Red- cracked wafer RUV: Features and Benefits Top surface Bottom Surface • 91 – 95 % accuracy of crack detection; • Higher than 2.0 seconds throughput rate; • As-cut and processed wafers; • Finished cells • Real-time feed-back on cracks; • Non-destructive; • Cost savings: ~ $500K/year (10MW module line or 25MW cell line) • ROI: ~ 3 months • 24/7, 97% up-time. RUV in Cell/Module Production www.innotechsolar.com;www.ruvsystems.nl RUV: Position in PV Chain 3 tools, 24/7, ~2.8 sec/cell; 97% up-time; ~10M cells inspected; MODULE WAFER CELL Yield improvement incoming cells Quality improvement outgoing modules Quality improvement outgoing wafers Yield improvement Process control (watch dog) Quality improvement outgoing cells Fully Automatic RUV-2.2 with Integrated AS • RUV: pinhole / m-cracks • A sub-millimeter “pinhole” is a process flaw, source of cell breakage and yield reduction. Pinhole image with HR Scanning Acoustic Microscopy. • UST developed a protocol to identify Si cells with pinholes using a proprietary Activation Station concept. • Activation Station passed a high-volume Acceptance Test at a customer location with 100% accuracy of pinhole detection. Acknowledgement: this material is based upon work supported by the Department of Energy under award number DE-EE0004549 3.5 mm 37th IEEE PV Specialists Conference, Seattle, WA, June 19-24, 2011

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