About this Template

1. About this Template • This template is intended as a drawing aid for creating and editing graphics in Microsoft PowerPoint. • It is recommended that graphics be designed within this file, but then copied and pasted into a different document (e.g. Microsoft Word or other PowerPoint file), for final appearance. • It is further recommended that diagrams be made in large, comfortable scale in this template, and reduced as needed when copying into final documents. Changing zoom level is also very helpful for detailed work. • Wording in this template is based on Microsoft PowerPoint 2002. Other versions may have slight differences.

2. The Drawing Grid • The grid is placed on the Slide Master, and therefore appears on every page. • The grid spacing is 0.063”, according to the default setting of PowerPoint 2002. • Grid display and snap behavior may be modified by changing options for “Grids and Guides”. • Printing with the grid in place is not recommended; either copy the diagram to another file or delete the grid before printing.

3. Black & White / Grayscale / Color • Before investing a lot of time and effort, one should carefully consider the trade-offs among simple black & white fill patterns, grayscale, progressive shading, and color. • Color and progressive shading often offer best visual impact for original documents, but the more simple patterns maintain best fidelity for reproduction. • In 2003 (the time of preparing this document), grayscale, shading, and color reproduction are still not universally reliable and image integrity is easily lost. • The following example patterns are helpful for comparing the results of printing, scanning, & reproducing graphics.

4. Particularly Useful Drawing Tools • For the most flexible drawing, the user should be very familiar with each of these drawing tools, found under the “Draw” toolbar. • Group/Ungroup • Order: Bring-to-Front, Send-to-Back, etc. • Align or Distribute • Rotate or Flip • Nudge • “Format AutoShape” and “Format Object” (invoked by right-clicking on an object or selecting from the “Format” menu) are also essential tools for changing the characteristics of any drawn object.

5. Spin-Coat Photoresist Mask and Expose Develop & Rinse Deposit Metal Film Integrated Process Sequences • This template is particularly convenient for integrated process sequences, as are common for semiconductor devices and micro electro-mechanical systems (MEMS). • Polygons are useful for bulk regions and thick films, and polylines are convenient for thin and conformal films. • The following diagrams show two brief examples, illustrating various features and differences in style. Grow Oxide on Silicon Pattern Photoresist Etch Oxide & Strip Resist Etch Silicon

6. Isometric Views • Isometric views can be simulated by a consistent use of angles for X-Y-Z directions. • Progressive grayscale shading also helps to convey depth. • Overlapping objects with and without outlines can hide unwanted features to simulate 3-D form. • Varying line thickness can furthermore be used to contrast different kinds of edges. • Below are two simple examples to “reverse engineer” for some implementation ideas.