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This lecture covers the essentials of building semiconductor devices, focusing on the increase of carrier concentration through doping with impurities from Group III (e.g., Boron) and Group V (e.g., Phosphorus) elements. It explores the concepts of intrinsic and extrinsic carrier concentrations, energy levels in silicon, Fermi level calculations, and the characteristics of MOS diodes. The discussion includes the selection of materials, ideal diode behavior, and the conditions for conduction in NMOS and PMOS devices, elaborating on concepts crucial for modern semiconductor technology.
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Lecture 1b - Review Kishore C Acharya
Building Semiconductor Devices • To build semiconductor devices # of carriers present in the semiconductor must be increased by adding impurities from Group III and Group V elements from periodic table • Typical impurities • Group III: Boron • Group V: Phosphorous
Increasing Carrier concentration by Doping • np = ni2 • n- elrctron concentration, p- hole concentration • ni = Intrinsic carrier concentration=1010/cc for silicon • For N type semi conductor • n = Nd donor concentration [1014 to 1018 /cc] – majority carrier • p = ni2 /Nd – minority carrier • For P type semi conductor • p = Na acceptor concentration [1014 to 1018 /cc] – majority carrier • n = ni2 /Na – minority carrier
Energy Levels of Silicon Ec = Edge of conduction band Ev = Edge of Valence band Efp = Fermi Level for P type Efn = Fermi Level for N type Eg = Energy gap kT = 0.025 eV at T = 300º K Ln(10) = 2.3
Fermi Level Calculation Example For Silicon ni = 1010 /cc For P type Semiconductor let Na = 1014 /cc Efp = Ec + Eg/2 + kT Ln(ni/Na) At t = 27º C, T = 300º K Efp = -4.05 - .55 + 0.025 Ln(1010 / 1014) = -4.83 eV
Fermi Level Calculation Example For Silicon ni = 1010 /cc For N type Semiconductor let Nd = 1016 /cc Efn = Ec + Eg/2 + kT Ln(Nd/ni) At t = 27º C, T = 300º K Efn = -4.05 - .55 + 0.025 Ln(1016 / 1010) = -4.25 eV
MOS Diode Structure Vint = (Efm – Efs)/q, Vint =0 once thermodynamic equilibrium is achieved Vint readjust the charge distribution so that Efm = Efs , where Efm and Efs are the Fermi Level of metal and semiconductor respectively
Metal Selection • Typical • Aluminum (Al), Ef = -4.1 eV • N+ poly silicon, Ef = -3.95 eV • Newer Material • For N type: Select Efn = -.411 0.2 eV • titanium, tantalum, zirconium, and hafnium • For P type: Select Efp = - 5.2 0.2 eV • platinum, palladium, nickel, cobalt, and ruthenium
Ideal MOS Diode( Efm = Efp) Vdiode = 0 Difficult to find Matching Metal so that Efm = Efp
Real MOS Diode Real MOS Diode Efm Efp Vint = Efm – Efs generates fields that readjusts charge distribution so that Vint = 0 After Equilibrium Efm = Efp Since Efm went down, it is similar to applying a positive Voltage to the metal side. Electrons accumulated at the surface and the band on the semiconductor side became curved
For Conduction Vs > 0 & Vgs Vt a negative threshold voltage about –1v This gate voltage is necessary to create a P channel under the oxide layer
For conduction Vd < 0 and Vgs Vt a positive threshold voltage about 1v This gate voltage is necessary to create a N channel under the oxide layer
Minimum Size MOS Transistor Channel Active Region Bulk or Substrate Is called the technology parameter = L/2. All sizes are integer multiple of
Condition for Conduction • Bulk must be reverse biased • Direct connection (P to Gnd, N to Vdd) • Connect bulk to one active which becomes source and proper source connection will reverse bias bulk • Channel must be created under the oxide layer • Apply a gate voltage of proper polarity exceeding a threshold • Circuit must be connected so that current flow is consistent with carrier flow
Quantitative criteria for conduction • For NMOSFET • Vds = Vd – Vs > 0 • Vgs = Vg – Vs Vtn (Vtn > 0, Typical 1V) • Vbs = Vb – Vs 0 • For PMOSFET • Vds = Vd – Vs < 0 • Vgs = Vg –Vs < Vtp (Vtp < 0, Typical –1 V) • Vbs = Vb – Vs 0
Source/Drain Source/Drain Gate Bulk (P) Bulk (N) Drsain/Source Drsain/Source Circuit Symbol Channel (N) Channel (P) Gate NMOSFET Bulk is P Channel is N Leakage current (P to N) Bulk to Channel PMOSFET Bulk is N Channel is P Leakage current (P to N) Channel to Bulk