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Screens and operation

Weir DM / DMA. Screens and operation. TEA Systems Corp. 65 Schlossburg St. Alburtis, PA 18011 610 682 4146 TZavecz@TEAsystems.com www.TEAsystems.com July 15, 2005. Focus -0.24 -0.16 -0.08 0.0 +0.08 +0.16 +0.24. Dose= 18 19 20 21 22 23 24.

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Screens and operation

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  1. Weir DM / DMA Screens and operation TEA Systems Corp. 65 Schlossburg St. Alburtis, PA 18011 610 682 4146 TZavecz@TEAsystems.com www.TEAsystems.com July 15, 2005

  2. Focus -0.24 -0.16 -0.08 0.0 +0.08 +0.16 +0.24 Dose= 18 19 20 21 22 23 24 Process Window The Weir DMA Automated Analysis Semi’ Equipment Focus Wafer Tracks Networked Factory Controllers & APC Metrology DoF Weir DM User Interface Servers APC Systems Automation Systems

  3. Weir DMA run interface • Interface appears when called • Program supplied call and optional data file, model, type of analysis and Weir DMA Macro to use • Analysis run independent of the user • Program will time out if data is not available of if it is held-up by the user. • Program restarts on next DMA call Weir DM/DMA

  4. Weir DMA Macro Setup Interface Screens

  5. Source • Specifying the source location of the data for the Macro Weir DM/DMA

  6. Process Window Setup 2 • Variables to analyze and their target PW ranges Weir DM/DMA

  7. PSFM Focus Matrix Weir DM/DMA

  8. PSFM Fixed Focus Weir DM/DMA

  9. Current Analysis Display • After a display is completed Weir DMA will • Display the results of the current dataset • Copy data for this dataset into the trend charts • This screen selects the current display graphic and statistics for reporting Weir DM/DMA

  10. Focus Analysis options setup Weir DM/DMA

  11. Dose Analysis Options Weir DM/DMA

  12. PW Trend Charts • These selected the Modeled Variables to be: • displayed on the current display (Push-buttons) • Saved in the Trend Plots (check boxes) Weir DM/DMA

  13. Raw Data Statistics Setup Weir DM/DMA

  14. Weir PW screens

  15. Weir PW process window controls Weir DM/DMA

  16. PW analysis options Weir DM/DMA

  17. Process Window • Tools to view the current graphics after an analysis Weir DM/DMA

  18. Dose @ best focus • Feature size vs Dose AFTER focus errors are removed • AND Best Focus response as a function of dose Weir DM/DMA

  19. Dose @ Best Focus Weir DM/DMA

  20. CDvsDose Report • Portion of the CD vs Dose report saved in the data spreadsheet Weir DM/DMA

  21. CD vs Focus Graph Weir DM/DMA

  22. CD vs Focus Report Weir DM/DMA

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