1. ESD SYSTEM OVERVIEW Transport rod 1 Cu Sample Butterfly valve 2 Bias Sample Sample Holder plate Electrometer RGA B-A gauge Pumping group Filament Conductance Gas Injection Line Filament Power Supply Full Range Gauge Bias Filament

2. ESD SYSTEM OVERVIEW

3. Cu SAMPLES

4. Circuit 35 KV V 2-3 A A +15 V V A

5. Cu Samples Heat treatment Machining Cleaning ESD main steps:   

6. Bake – out: lower part 9 8 6/11 7 1 2 3 5 10 4

7. Bake – out: upper part 3B 2B 4B 1B

8. RGA scans

9. RGA scans (valve closed)

10. Degassing: 9 Cycles @ 0.35KV

11. Degassing: 9 Cycles @ 0.70KV

12. Degassing: 9 Cycles @ 1.5KV

13. Calibration: H2 Calibration Factor

14. Calibration: N2 Calibration Factor

15. Calibration: N2 2nd set of data Calibration Factor

16. Degassing: 30 Cycles @ 0.35 KV

17. CURRENT!!!!!

18. Desorption Yield

19. Desorption Yield • 15 RGA Cycles for background Signal + biassing of the sample • 15 RGA Cycles with the filament switched on • filament + sample degassing

20. Desorption Yield • switch on the filament • 15 RGA Cycles for background pressure • 15 RGA Cycles with the sample biased

21. Desorption Yield @ 0.35 KV

22. Desorption Yield @ 10 KV

23. N2 calibration

24. Energy correlation

25. Desorption Mechanisms

26. Desorption Mechanisms

27. Stopping power and Range

28. Stopping power and Range

29. Energy correlation

30. Circuit 35 KV V 2-3 A A +15 V V A

31. Extra-electron source

32. Degassing @ 5 KV

33. Improvements