1. DS-07033 Track System.qxd 9/8/06 11:59 AM Page 1 MultiLink™Robot Track Atmospheric Track System Kensington Laboratories’ 300mm capable MultiLink™ Robot Track system provides high speed, with fast acceleration and deceleration, in a reliable and proven design. The unique vertical mounting of the Track system establishes a datum plane, eliminating the need for additional robot leveling. Kensington Laboratories, a leader in advanced automation technology, develops and manufactures the highest quality and most cost effective robotic automation solutions in the industry – all backed by Kensington’s global service and support network. • High Throughput: The MultiLink Robot Track system is designed for high-speed operation with up to 200 inches/sec2acceleration rates and peak speeds of 55 inches per second. Kensington Laboratories’ superior quality construction ensures that the Track base is precision ground to a flatness of 0.002" over the entire track travel length, enabling the Track to achieve these high speeds. • Small Footprint: The compact design allows the end-user to take advantage of the space below the Track for their system packaging, making efficient use of equipment footprint. • Cleanliness: The unique, side-mounted Track maximizes the exhaust opening of the equipment front end module allowing uniform air flow from the fan filter unit through the perforated fab floor. • Precise Robot Placement Accuracy: The Track is mounted vertically to the end-user equipment with the top and bottom of the robot mounted rigidly to the Track. This rigid, vertical design eliminates motion settling time and improves the overall accuracy of the robot. • Design for Manufacture: Integrated alignment features are incorporated in the MultiLink Robot Track to assure precise system registration of critical components, such as Kensington Laboratories’ 300mm ADO load ports. This reduces the time required to bring systems online and provides faster production cycle time. • Safety: The Track employs multiple safety mechanisms that sense if the system has struck an object and automatically shut the system down to prevent or minimize damage.

2. DS-07033 Track System.qxd 9/8/06 11:59 AM Page 2 MultiLinkTMRobot Track Specifications Maximum Acceleration Maximum Velocity Repeatability Track Travels Two station track Three station track Four station track 200 inches/sec2(5.1 m/sec2) 55 inches/sec (1.4 m/sec) <0.00001 inches (<0.0025 mm) 26 inches (660.40 mm) 40.62 inches (1,031.75 mm) 60.5 inches (1,536.70 mm) Specifications are subject to change without notice. Mounting Specifications Two Station Track Side View (all configurations) Mounting Plane 37.586" Track Robot 22.250" Four Station Track Three Station Track 57.468" 77.350" 22.250" 22.250" 38.675" 510-620-0235 ext 718 or visit www.kensingtonlabs.com FM27207 © 2006 Kensington Laboratories, LLC. All rights reserved. Automatic Door Opener is a trademark of Kensington Laboratories. The Kensington logo is a registered trademark of Kensington Laboratories. All other trademarks are property of their respective owners. DS-07033