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Vacuum chuck for probe station

This project involves the design and manufacturing of a vacuum chuck intended for use in a probe station to hold and accurately locate 2 mil thick silicon chips. The vacuum chuck consists of two aluminum plates bonded to an SLA-manufactured vacuum manifold. The request focuses on machining the aluminum parts as modeled in SolidWorks 2009. Key tolerances include ensuring flatness, parallelism, and precise relative location of features to maintain accuracy within 1 mil. Specific attention is required for the suction plate to ensure effective vacuum performance.

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Vacuum chuck for probe station

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  1. Vacuum chuck for probe station contacts: Howard Wieman hhwieman@lbl.gov work: 510 495-2473 cell: 631 431-8236 Eric Anderssen ECAnderssen@lbl.gov 510 495-2821

  2. This vacuum chuck will be used to hold and accurately locate 2 mil thick silicon chips in a probe station. It consists of two aluminum plates bonded to a SLA manufactured vacuum manifold. This is a request for the machined aluminum parts. The parts are modeled with SolidWorks 2009 Top Assembly: “vc probe assembly.SLDASM”

  3. machining tasks

  4. “vc probe top.SLDPRT” tolerance: top and bottom surface flat and parallel to 2 mil surface finish? tolerance: locating edges for the silicon chips – relative location with respect to each other good to 1 mil

  5. “vc probe suction plate.SLDPRT” tolerance: top and bottom surface flat and parallel to 2 mil tolerance: capture lip radius -0 + 4 mil surface specification ? must suck down to a metal vacuum plate

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