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SU-8 surface-micromachining process utilizing PMGI as a sacrificial material

SU-8 surface-micromachining process utilizing PMGI as a sacrificial material. 2007 IEEE MEMS G. Foulds , R. W. Johnstone M. Parameswaran. 學號 :9635517 姓名 : 陳立仁. Outline . Introduction Fabrication process Result Conclusion. Introduction. A novel process uses PMGI as

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SU-8 surface-micromachining process utilizing PMGI as a sacrificial material

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  1. SU-8 surface-micromachining process utilizing PMGI as a sacrificial material 2007 IEEE MEMS G. Foulds , R. W. Johnstone M. Parameswaran 學號:9635517 姓名:陳立仁

  2. Outline • Introduction • Fabrication process • Result • Conclusion

  3. Introduction • A novel process uses PMGI as sacrificial layer and lift-off resist for SU-8. • The whole process can be completed in a single day .

  4. Fabrication process

  5. Fabrication process (cont.)

  6. Fabrication process (cont.)

  7. Fabrication process (cont.)

  8. Result

  9. Result (cont.)

  10. Result (cont.) “Automated assembly of hingeless 90° out-of-plane microstructures,” S H Tsang, D Sameoto, I G Foulds, R W Johnstone, M parameswaran

  11. Result (cont.) “Automated assembly of hingeless 90° out-of-plane microstructures,” S H Tsang, D Sameoto, I G Foulds, R W Johnstone, M parameswaran

  12. Conclusion • An ideal process for proof of concept prototyping . • The height and thickness of the structure can be changed easily to fit different applications .

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