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Innovative Low Energy Ion Beam Technologies

This joint research activity focuses on the development of innovative low energy ion beam technologies, including ion extraction and beam formation, advanced ion transport and control systems, highly charged ion beams, ion optics for nano-beams, and ion beam guiding in nano-capillaries.

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Innovative Low Energy Ion Beam Technologies

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  1. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • Co-ordinator:  • R.W. McCullough, Queen’s University Belfast, N Ireland, UK, • Deputy-coordinator :  • R. Trassl, Justus Liebig University, Giessen, Germany • Participating countries : • Austria, France, Germany, United Kingdom NewLeif FP6 I3

  2. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • Tasks • Ion extraction and beam formation: • Optimised extraction from ECR sources for low ion beam energies • Highly charged ion beams from room-temperature EBIT sources NewLeif FP6 I3

  3. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • Advanced ion transport and control systems •  Beams of highly charged ions at eV-energies •   Ion optics for nano-beams and nano-positioning of single highly charged ions on surfaces with high energy resolution •   A novel technique for ultra high resolution, low energy HCI beam structuring  • Ion beam guiding in nano-capillaries NewLeif FP6 I3

  4. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • Task A • Optimised extraction from ECR sources for low ion beam energies • Originality of Activity • Combination of computer simulation techniques and experimental emittance measurements • "perfect" geometry and so optimise the extraction for low energy ion beam production with extraction fields of electrostatic and/or magnetic field configurations NewLeif FP6 I3

  5. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • JLU Giessen, Germany + CEA, Caen, France + QUB Belfast, UK • WORK PACKAGE • Specification/simulation/design/construction/emmitance measurements of extraction geometries to be tested • Extracted beam energy distribution measurements • Documentation and dissemination of results • Implementation of optimum geometries throughout I3 ECR sources NewLeif FP6 I3

  6. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • Task B • Highly charged ion beams from room-temperature EBIT sources • Originality of Activity • lon beams with excellent emittance (1mmmrad / 10 keV/q) • nano-positioning of single HCIs • innovative cooling techniques to achieve energy spreads in the meV *q range NewLeif FP6 I3

  7. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • FZR, Rossendorf, Germany + QUB, Belfast, UK • WORK PACKAGE • Design/implementation of beam retardation system coupled to EBIT and ECR • Implementation/characterization of 14.5GHZ 2kW ECRIS • X-ray spectroscopy, q/A analysis diagnostics of a room-temperature EBIT • Implementation/test of computer-added beam control • Test of ECR operation in DC and afterglow mode • Test of EBIT operation in pulsed and leaky mode • Surface modification experiments • Design/test of an EBIT with ion production on zero potential NewLeif FP6 I3

  8. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • Task C • Beams of highly charged ions at eV-energies • Originality of Activity • High intensity, low emittance, low energy spread, low energy (eVs) HCI beams • Combination of electrostatic and magnetic elements combined with nano-optical system of IMS and nanocapillary guiding/focusing techniques of HMI. NewLeif FP6 I3

  9. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • CEA Caen + QUB Belfast • WORK PACKAGE • Installation /diagnostic and optimisation of prototype beam line • Improvement of vacuum conditions and magnetic sheilding • Development of beam purifying system • Experimental study of beam energy distribution • Integration of a beam-pulsing system for specific time-shaping • Replacement of the ECR-ion source • Delivery of intense eV, highly charged high quality ions beams NewLeif FP6 I3

  10. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • Task D • Ion optics for nano-beams and nano-positioning of single highly charged ions on surfaces with high energy resolution • Originality of Activity • the trapping and cooling of the ions before extraction • novel single-ion positioning and control optics NewLeif FP6 I3

  11. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • MPIK Heidelberg, Germany, + University of Duisberg-Essen, Germany • WORK PACKAGE • Ion beam optics simulations • Ion optics design specifications, purchasing • Mechanical engineering: drawings and construction • Prototype ion focusing system: machining • Ion cooling test for extraction • Vacuum, ion optics assembly vibration insulation tests • Delivery/ installation of AFM • Coupling to EBIT beam line, beam tuning • Sample preparation and irradiation studies with semiconductors • Scanning of complex patterns: electronic tests; data acquisition NewLeif FP6 I3

  12. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • Task E • A novel technique for ultra high resolution, low energy HCI beam structuring • Originality of Activity • Concept for a reduction ion-optical system for very low HCI energies • ultra high resolution (<10 nm, depending on the quality of the illumination system) with very low energy HCI’s • The desired low beam energy at the wafer level 20 eV per charge is achieved by an innovative imaging strategy NewLeif FP6 I3

  13. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • IMS, Vienna, Austria + New LEIF partners • WORK PACKAGE • Definition of User Requirement Specs • Design of HCI-optics • HCI-optics fabrication • Demo experiments (IMS + New LEIF partners) • JRA joint experiments: HCI nanostructuring • Industry feasibility study • Prototype tool design and fabrication­ (if consortium can be formed) NewLeif FP6 I3

  14. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • Task F •  Ion beam guiding in nano-capillaries • Originality of Activity • potentially important applications in both macroscopic and mesoscopic focusing • may provide superior focusing than conventional methods NewLeif FP6 I3

  15. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • HMI, Berlin, Germany + QUB, Belfast, UK • WORK PACKAGE • Macroscopic focusing by ion guiding • Mesoscopic • Focusing by ion guiding • Research on the technique to guide ions in capillaries • Application of AFM/STM NewLeif FP6 I3

  16. Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies • . Ion focusing by capillary guiding • fast ion tracks produced bent foil • after etching of the capillaries and stretching of the foil slow ions are focused on a spot using guiding effects • fast ion tracks are produced in a plane foil • the foil is bent leading to focusing by guiding effects NewLeif FP6 I3

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