Improving Equipment Performance Tracking Using SEMI Standards

1. SEMICON West 2006 STEPMethods to Measure/Improve Equipment Productivity Improving Equipment Performance Tracking Using SEMI Standards Lisa Pivin Intel lisa.m.pivin@intel.com

2. Agenda • Drivers for Automated Data Collection for Equipment Performance • Methods of Automated Data Collection for Equipment Performance • Issues Seen with Using E5/E30/E58 for Equipment Performance Data Collection • How E116 Can Help Fix These Issues • How Factories Can Leverage E116 for Equipment Performance • Conclusion SEMICON West 2006 STEP

3. Why Care About Equipment Performance? • Equipment Performance is key to factory output • Factory Output is limited to Performance of Bottleneck Equipment Individual Equipment Capacities Factory Capacity Bottleneck Equipment Performance = Factory Output SEMICON West 2006 STEP

4. Competitive Semiconductor Manufacturing (CSM) Survey 28 Factories Surveyed & Best Practices Identified (’97 – ’02) • Equipment throughput performance is highly divergent among competing fabs. • Even among leaders, there is significant improvement potential. Source: Dr. Robert Leachman, UC Berkeley SEMICON West 2006 STEP

5. Source: Dr. Robert Leachman, UC Berkeley Best Practices (from CSM Survey) • The Leading Fabs: • Rigorously measure OEE of their processing equipment, identify losses in throughput and prioritize needed improvements. • Automatically capture equipment status using SECS-II interfaces. • Automatically monitor actual processing time and compare against engineering standards; alarms are triggered when elapsed times are excessive. • Provide automated notification to operators or technicians when equipment are about to become idle or when they require maintenance or attention. • Have instilled participation on continuous improvement teams focusing on equipment productivity. SEMICON West 2006 STEP

6. Need to Start with Accurate Measurement of Current Performance BUT…Issues Exist with Collecting This data To Improve Equipment Performance • Collect Equipment Data to Measure Current Performance • Analyze Data to Identify Performance Losses • Determine Reasons for Performance Losses • Address Reasons for Performance Losses • Implement cross-functional teams to improve operational issues • Work with supplier to address equipment design issues to improve performance SEMICON West 2006 STEP

7. Host Controller Collecting E10 Data Automated Data Collection via Standard Interface Host Controller Standard E5 SECS-II Interface Non-Standard Analog Signals Manual Recording of Equipment States Hardwiring into Equipment to Get Analog Signals Production Equipment SEMICON West 2006 STEP

8. Equipment Automation Standards Used for Data Collection • SEMI E5 – Semiconductor Equipment Communication Standard (SECS-II) • SEMI E30 – Generic Equipment Model (GEM) • SEMI E58 – Automated Reliability, Availability, and Maintainability (ARAMS) SEMICON West 2006 STEP

9. 8 7 6 5 4 3 2 1 Using E5 (SECS-II) for Equipment Performance Data Event Reporting Processing Started Alarm Set Alarm Clear Host Controller Processing Complete E5 Compliant Equipment Alarm Reporting Alarm Code: 0 = Not Used 1 = Personal Safety 2 = Equipment Safety 3 = Parameter Control Warning 4 = Parameter Control Error 5 = Irrecoverable Error 6 = Equipment Status Warning 7 = Attention Flags 8 = Data Integrity Bits 7-1 Alarm Code Bit 8 1 = Set 0 = Cleared Alarm codes 1, 2, and 5 are used in some performance tracking systems (e.g., SEMATECH’s TP2) to detect a failure or processing stopped situation. SEMICON West 2006 STEP

10. Using E30 (GEM) for Equipment Performance Data • E30 proposes a Processing State Model for semiconductor equipment • Includes standard automated messages to receive equipment processing data • Requires alarm set / clear messages to be provided by equipment • Downside: Does not require alarm codes IC Makers can use E5 SECS-II messages to get E30 Processing State changes & to get Alarm Set/Clear messages for performance tracking data SEMICON West 2006 STEP

11. Using E58 (ARAMS) for Equipment Performance Data • E58 States are identical to E10. • Equipment reports E10 state changes to host computer via E5 SECS-II messages. • Includes E58 substate codes to indicate substates of E10 • Equipment supports User Interface (UI) for manual state changes entered by user at equipment console. E10 / E58 States Host Controller E58 Compliant Equipment E58 States SEMICON West 2006 STEP

12. Using E116 (EPT) for Equipment Performance Data • E116 supports only the basic states the equipment knows, without requiring manual input • BUSY • IDLE • BLOCKED • States are reported for major modules (e.g., processing chambers) of the equipment, as well as the overall equipment • Equipment reports E116 state changes to host computer via E5 SECS-II messages E116 States E116 States Host Controller E116 Compliant Equipment SEMICON West 2006 STEP

13. Issues with Automated Data Collection using E5/E30/E58 • Lack of standardized messages, state models, equipment behavior for equipment performance tracking • Inability to consistently obtain performance data for individual chambers of a multi-chamber equipment • No standard “failure” message • Dependency on manual input from a human operator SEMICON West 2006 STEP

14. Lack of Standardized Messages, State Models, Equipment Behavior for Performance Tracking Equipment Type 1 11 state transitions “Processing Started” Equipment Type 2 “Batch Started” 15 state transitions Equipment Type 3 “Wafer Started” 18 state transitions “Implant Started” Equipment Type 4 41 state transitions Different equipment types report different events. Only 1 equipment studied used exact GEM Processing Model – all others had custom states & transitions. Impact: Need to customize Host software to analyze specific messages; Longer System Integration Time SEMICON West 2006 STEP

15. Lack of Ability to get Module-Level Data DOWN UP E30 GEM Processing State model / events only apply to overall equipment, not individual chambers. Equipment availability tracked as either 0% or 100% Need ability to track at partial % Impact: Over- or Under-estimated Availability due to inability to get “Partial Availability” data SEMICON West 2006 STEP

16. No Standard Failure Message Using E30, you get Alarm Set & Alarm Cleared messages Alarm Set Host Equipment Alarm Clear But no “failure” message!! As a result, need to determine which of 100’s (or 1000’s!) of equipment alarms cause failures! It is not feasible to characterize every single alarm, so often guesses are made to pick which alarms should be tracked as failures. SEMATECH’s TP2 approach: Use E5 alarm categories 1 (Personal Safety), 2 (Equipment Safety), 5 (Irrecoverable Error) as failures. But, E30 does not require Alarm Category to be supported! Impact: Missed Failures; Overestimated Equipment Performance; Missed Opportunities for Performance / Productivity Improvements SEMICON West 2006 STEP

17. Dependency on Manual Input E58-compliant equipment Manual Input Required to Indicate Equipment’s E10 State (e.g., equip. doesn’t know it is Scheduled Down unless it is told) Now the equipment has a mix of manually input data and automatically tracked equipment states  the entire mix of data is at risk of human error! Impact: Mixing of Manual Data + Automatically Provided Data  incorrect E10 states; Over- or Under-estimated equipment performance; Manual input at equipment not acceptable in 300mm highly automated factory SEMICON West 2006 STEP

18. Study – Issues with Data Collection (1) SEMICON West 2006 STEP

19. Study – Issues with Data Collection (2) SEMICON West 2006 STEP

20. Study – Issues with Data Collection (3) SEMICON West 2006 STEP

21. Cost Impacts of Over- or Under-Estimating Equipment Performance - Example • If actual availability of the equipment is 4% higher than estimated: • The inaccurate data indicates that an additional equipment is required • When planning new factory, this is an additional capital cost of $12 million • If actual availability of the equipment is less than estimated: • Missed opportunities for performance improvements & missed revenue SEMICON West 2006 STEP

22. What IC Makers Need • IC Makers need accurateequipment data to measure OEE and utilization • Total Time that Equipment is IDLE • Total Time that Equipment is BUSY processing • Total Time that Equipment is BLOCKED from processing • Reasons why Equipment is BLOCKED from processing • Run Rate / Throughput Information • IC Makers need standard events and state model to get this data • IC Makers need fully automated equipment operations (No Manual Intervention) to track equipment states SEMICON West 2006 STEP

23. How E116 Can Help • Lack of standardized messages, state models, equipment behavior for equipment performance tracking. • E116 defines standardized state model, messages, and equipment behavior for reporting performance data. • Inability to obtain performance data for individual chambers of a multi-chamber equipment. • E116 requires the state model and associated data to be reported for individual processing chambers of an equipment, as well as the overall equipment. • No standard “failure” message. • E116 provides an event to indicate when the equipment is blocked from processing, and provides details on why equipment is blocked from processing. • Dependency on manual input from a human operator. • E116 relies on equipment data only; no manual input. SEMICON West 2006 STEP

24. “What if” Study - E116 Improvements (1) SEMICON West 2006 STEP

25. “What if” Study - E116 Improvements (2) SEMICON West 2006 STEP

26. “What-If” Study – E116 Improvements (3) SEMICON West 2006 STEP

27. Building the E10 States • Keep Manual data separate from Equipment data to sustain equipment data accuracy • Use data from MES & Equipment to produce E10 metrics Data on NON-SCHEDULED TIME E10 State Logic MES NON-SCHEDULED TIME Data on ENGINEERING TIME ENGINEERING TIME Data on MANUFACTURING TIME PRODUCTIVE TIME Data on SCHEDULED DOWNTIME STANDBY TIME Data on UNSCHEDULED DOWNTIME SCHEDULED DOWNTIME Equipment is BUSY Equipment UNSCHEDULED DOWNTIME Equipment is IDLE Equipment is BLOCKED SEMICON West 2006 STEP

28. Mapping the States MES based and equipment based E116 Data NON-SCHEDULED (MES) AND ANY STATE* (E116) MANUFACTURING (MES) AND BLOCKED (E116) ENGINEERING (MES) AND BLOCKED (E116) UNSCHEDULED DOWN (MES) AND ANY STATE* (E116) SCHEDULED DOWN (MES) AND ANY STATE* (E116) ENGINEERING (MES) AND BUSY (E116) ENGINEERING (MES) AND IDLE (E116) MANUFACTURING (MES) AND IDLE (E116) MANUFACTURING (MES) AND BUSY (E116) E10 States NON-SCHEDULED TIME UNSCHEDULED DOWNTIME SCHEDULED DOWNTIME ENGINEERING TIME STANDBY TIME PRODUCTIVE TIME *ANY STATE (E116) means that the E116 state is not a factor in determining the E10 state. SEMICON West 2006 STEP

29. Using E116 to Pareto Reasons for Blocked Processing Without E116: IC Maker must analyze alarms to determine which alarms cause equipment to be BLOCKED from processing. With E116: A BLOCKED event and a BLOCKED REASON are sent when equipment is BLOCKED from processing. Data can be analyzed to determine failures that impact processing. SEMICON West 2006 STEP

30. Using E116 to Measure Detailed Processing Source: SEMATECH • E116 provides events when equipment transitions to BUSY state, when equipment begins new task in BUSY State, and when equipment is BLOCKED waiting for external source (e.g., material handling for unload). • Timestamps can be tracked to analyze details of equipment processing. SEMICON West 2006 STEP

31. Using E116 to Compare Processing Task Durations Across Identical Equipment 16 identical chambers performing the same task (same recipe) exhibit a wide range of performance. % of Task Instances Task Processing Duration (hh:mm:ss.000) SEMICON West 2006 STEP

32. Should Start Actual Start Should Finish Actual Finish Start Lag Efficient Processing Inefficient Processing Theoretical Duration Using E116 to Compare Actual Processing Times vs. Expected Processing times • Actual-Start and Actual-Finish collected via E116 • Should-Start = Max{precedent Actual-Finish times} • Should-Finish = Actual Start +Theoretical Duration SEMICON West 2006 STEP

33. Implementing E116 in Factories • Add E116 standard to purchase specifications for equipment • Modify host control software to accept E116 messages • Modify Equipment Performance systems to accept E116 data & combine with MES equipment states to calculate E10 states/metrics Equipment Performance System (calculates & maintains E10 State) Equipment State Equipment State E116 Data Host Controller MES E5/E30 Events/Alarms E116 Messages E116-compliant Equipment SEMICON West 2006 STEP

34. Using E116 to Improve Performance • Leverage E116 to improve implementation/development time • Use standard Host Controller framework based on collecting E116 standard messages to minimize development time • Leverage “BLOCKED” state to eliminate need to identify which alarms cause failures • Collect E116 data to measure: • Time Equipment was BUSY • What tasks it was busy doing • How long these tasks took • Variance in task processing time between products, equipment, sites, etc. • Time Equipment was BLOCKED • How long equipment was BLOCKED overall • How long equipment was blocked for high-level categories of Blocked time • How long equipment was blocked for specific reasons • Pareto top equipment why equipment was blocked • Time Equipment was IDLE • Module-level data • Partial Availability based on chamber-level uptime/downtime • Regularly review data to determine areas for improvements • Drive productivity improvement teams & feedback to OEMs for improvement SEMICON West 2006 STEP

35. Summary • Improved equipment performance is key for IC Makers. • Improving bottleneck equipment performance improves factory output • First, accurate data is needed. Automated data collection is best. • Without E116, IC Makers lack ability to easily collect automated, accurate equipment performance data. • Lack of standardized messages, state models, equipment behavior • Inability to report module-level performance data • No standard “failure” message • Dependency on manual input from a human operator • Issues with data result in: • Over or under estimates of equipment performance • Increased system integration time / effort for performance tracking • Missed opportunities for performance improvements • Unnecessary capital purchases and/or missed revenue due to capacity • The new E116 standard was designed to address these issues with automated data collection of equipment performance data. • With E116, IC Makers can improve performance data collection and use data to drive performance improvements to improve output. SEMICON West 2006 STEP