1 / 11

Solid State Engineering

Solid State Engineering. Instructor ： Prof. F. H. Wang E-mail ： fansen@dragon.nchu.edu.tw. Schedule. Lectures ： Friday 09:10-12:00 (@ EE202) Office Hours: Wednesday 09:10-12:00 (@ EE706) Friday 13:30-17:30 (@ EE706) . Relation to Other Courses. Electronics ( 電子學 )

mave
Télécharger la présentation

Solid State Engineering

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. Solid State Engineering Instructor：Prof. F. H. Wang E-mail：fansen@dragon.nchu.edu.tw

  2. Schedule • Lectures ： • Friday 09:10-12:00 (@ EE202) • Office Hours: • Wednesday 09:10-12:00 (@ EE706) • Friday 13:30-17:30 (@ EE706) Adv. VLSI Tech. / NCHU EE / Prof. F.H.Wang

  3. Relation to Other Courses • Electronics (電子學) • Solid State Devices (固態電子元件) • Semiconductor Devices and Physics(半導體元件物理) • Material/Thin-film Analysis (材料/薄膜分析) • Advanced VLSI Technology (超大型積體電路尖端製造技術) Adv. VLSI Tech. / NCHU EE / Prof. F.H.Wang

  4. Reading Materials • Primary Text: • Hong Xiao, “Introduction to Semiconductor Manufacturing Technology”, Prentice Hall, 2001, ISBN 0-13-022404-9 (歐亞書局) • Course Reader: • Lecture notes Adv. VLSI Tech. / NCHU EE / Prof. F.H.Wang

  5. Reading Materials • Reference Texts: • Fundamental: • M. Quick and J. Serda, “Semiconductor Manufacturing Technology”,Prentice Hall, 2001 • Peter Van Zant, “Microchip Fabrication” McGraw Hill, 5e. 2004 • Advanced: • C.Y. Chang & S.M. Sze, “ULSI Technology”, McGraw Hill, 1996. • Stanley Wolf, “ Silicon Processing for the VLSI Era ” Lattice Press Adv. VLSI Tech. / NCHU EE / Prof. F.H.Wang

  6. Grading • Homework (3 times) – 30% • Midterm Exam. – 30% • Final Exam – 40% • Attendance – +/-6% 100％ Adv. VLSI Tech. / NCHU EE / Prof. F.H.Wang

  7. Exam. Schedule • Midterm Exam. – 95/11/17 • Final Exam. – 96/1/12 Adv. VLSI Tech. / NCHU EE / Prof. F.H.Wang

  8. Contents (I) • Unit I: Hot (or energetic) Processes • Diffusion • Thermal Oxidation • Ion Implantation • Rapid Thermal Processing Adv. VLSI Tech. / NCHU EE / Prof. F.H.Wang

  9. Contents (II) • Unit II: Pattern Transfer • Optical Lithography • Photoresists • Etching Adv. VLSI Tech. / NCHU EE / Prof. F.H.Wang

  10. Contents (III) • Unit III: Thin Films • Physical Deposition: Evaporation and Sputtering (chapter 12) • Chemical Vapor Deposition (chapter 13) Adv. VLSI Tech. / NCHU EE / Prof. F.H.Wang

  11. Contents (VI) • Unit IV: Process Integration • Device Isolation, Contacts, and Metallization • CMOS Technologies • IC manufacturing Adv. VLSI Tech. / NCHU EE / Prof. F.H.Wang

More Related