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This document outlines the capabilities and specifications of a high-resolution ICP-MS device designed for advanced particle analysis. Featuring a sophisticated detection system with entrance slit, quad lenses, extraction/lenses, skimmer, and sampler, it operates with a magnet and flight tube. The setup utilizes a CETAC LSX-500 laser ablation unit, capable of generating shot sizes of approximately 50 to 200 μm, with scan rates of 20 Hz and 100 kHz rep rates. It is vital for precise analysis of materials, including Y2O3 pellets and NIST standards for accuracy.
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ESA ELEMENT SCANNING HIGH RES ICP-MS DEVICE Detector Entrance slit Quad lenses Extraction lenses Skimmer Sampler Magnet & flight tube ICP Neb & Spray chamber
Laser Ablation ICP-MS CETAC LSX 500 Thermo Finnigan Element www.cetac.com www.thermo.com
Particles from Ablated Y2O3 Pellet Track length u velocity ~ 27 m/s
31 μm/s scan rate, NIST C1102 fs LASER ns LASER 100 kHz Rep. Rate, ~ 50 μm spot size 20 Hz Rep. Rate, 50 μm spot size
CETAC LSX-500 266 nm ~ 20 ns 1 laser shot 200 μm spot diameter 0.006 s/ data point NIST GLASS 610
NIST 1648DUST PELLET 1 laser shot 200 μm spot diameter 0.005 s/data point