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PK-1500 Technical data sheet

PK-1500 Technical data sheet. KOLON Central Research Park Electronic Materials Research Institute 2010. 11. General Properties. Exposure Energy vs. Sensitivity. Test Conditions Test Artwork : KOLON Test Artwork(Glass Mask) Lamination : 110 °C, 4kg/cm 2 , 2.0m/min

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PK-1500 Technical data sheet

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  1. PK-1500 Technical data sheet KOLON Central Research Park Electronic Materials Research Institute 2010. 11.

  2. General Properties

  3. Exposure Energy vs. Sensitivity • Test Conditions • Test Artwork : KOLON Test Artwork(Glass Mask) • Lamination : 110 °C, 4kg/cm2, 2.0m/min • Exposure : 5Kw, collimated light • Development : 1.0wt% Na2CO3, Temp. 30 °C, Break Point 50%, Spray Pressure 1.5kg/cm2

  4. Resolution • Test Conditions • Test Artwork : KOLON Test Artwork(Glass Mask) • Lamination : 110 °C, 4kg/cm2, 2.0m/min • Exposure : 5Kw, collimated light • Development : 1.0wt% Na2CO3, Temp. 30 °C, Break Point 50%, Spray Pressure 1.5kg/cm2

  5. Adhesion • Test Conditions • Test Artwork : KOLON Test Artwork(Glass Mask) • Lamination : 110 °C, 4kg/cm2, 2.0m/min • Exposure : 5Kw, collimated light • Development : 1.0wt% Na2CO3, Temp. 30 °C, Break Point 50%, Spray Pressure 1.5kg/cm2

  6. 1/1 Resolution • Test Conditions • Test Artwork : KOLON Test Artwork(Glass Mask) • Lamination : 110 °C, 4kg/cm2, 2.0m/min • Exposure : 5Kw, collimated light • Development : 1.0wt% Na2CO3, Temp. 30 °C, Break Point 50%, Spray Pressure 1.5kg/cm2

  7. Stripping Properties • Test Conditions • Pretreatment  Lamination  Exposure  Developing  Stripping • Stripping condition: 50oC, NaOH 3.0 wt% • Test method: Dipping Method • Stripped particle size: S (small, lower than 0.5cm), M (medium, 0.5~2cm), L (large, 2~5cm), LL (extra large, larger than 5cm)

  8. SEM Images (Line/space = 40/40㎛, x400) PK-1540, 7sst /21sst PK-1540, 8sst /21sst PK-1540, 9sst /21sst (Line/space = 40/40㎛, x200) PK-1540, 7sst /21sst PK-1540, 8sst /21sst PK-1540, 9sst /21sst

  9. SEM Images (Line/space = 50/50㎛, x350) PK-1550, 8sst /21sst PK-1550, 9sst /21sst PK-1550, 10sst /21sst (Line/space = 50/50㎛, x200) PK-1550, 8sst /21sst PK-1550, 9sst /21sst PK-1550, 10sst /21sst

  10. Scum / Sludge Test • <Sludge/Scum Test condition> • Filter paper : ADVANTEC-5A • Filtering Time : Measuring after being filtered 50ml and 100ml • Sludge Weight : Measuring sludge weight after being filtered 300ml • Scum Generator : Running Time is 4hrs • temp: 30oC

  11. Scum / Sludge Test 1. Test condition. * Scum & sludge test : Na2CO3 1.0 wt% , 300mL , DFR amount 1㎡/L , 30℃, 300rpm 2. Test method. Immerse 1 m2/L of DFR to 1.0 wt% of developing solution(Na2CO3) Mechanical Stirring for 1 hrs Under yellow room Homo-mixer Stirring for 4 hrs (RPM : 3000, Temp : 30℃) After holding 1day, Check the sludge Occurred & Filtering test

  12. General Process Guideline * Clean Room: 20~22 °C, 50 ± 10 % RH

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