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MAS.961 Special Topics: How To Make Something That Makes (almost) Anything NanoFabrication

MAS.961 Special Topics: How To Make Something That Makes (almost) Anything NanoFabrication. J. Jacobson – MIT – 02/17/09 jacobson@media.mit.edu. Outline. Optical Fabrication Technologies Probe/MEMS Fabrication Technologies Imprint Fabrication Technologies

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MAS.961 Special Topics: How To Make Something That Makes (almost) Anything NanoFabrication

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  1. MAS.961 Special Topics:How To Make Something That Makes (almost) Anything NanoFabrication J. Jacobson – MIT – 02/17/09 jacobson@media.mit.edu

  2. Outline • Optical Fabrication Technologies • Probe/MEMS Fabrication Technologies • Imprint Fabrication Technologies • Particle Beam Fabrication Technologies

  3. Immersion Lithography 22-nm immersion interference lithography T. M. Bloomstein, M. F. Marchant, S. Deneault, D. E. Hardy, and M. Rothschild 10 July 2006 / Vol. 14, No. 14 / OPTICS EXPRESS 6434 Received 11 May 2006; revised 23 June 2006; accepted 23 June 2006

  4. Immersion Lithography (Air) (Liq)

  5. Stereolithography Speed Resolution – Two Photon

  6. Laser CVD Mechanism: Pyrolitic (Heating in absense of O2) Chemical Vapor Deposition (500 to 2000°C local temperature). Rates: Fiber growth rates > 2 mm/s,metals and ceramics. Linear growth rate of 200 mm/s Carbon volumetric deposition rate of 50 mm3/s carbon. Materials: Cu, Au, Si, Al, W, C, WC, B, TiC, TiN, SiC, and Si3N4. http://www.me.gatech.edu/Lackey/nsfgranteesjan02.pdf

  7. LENS (Laser Engineered Net Shaping) www.optomec.com

  8. Outline • Optical Fabrication Technologies • Probe/MEMS Fabrication Technologies • Imprint Fabrication Technologies • Particle Beam Fabrication Technologies

  9. Dip-Pen Nanolithography Mirkin et. al.

  10. Contact Mode Nanoparticle AFM Hubert et.al.

  11. Massively Parallel Dip-Pen Nanolithography with 55 000-Pen Two-Dimensional Arrays http://mass.micro.uiuc.edu/research/current/nanolithography/2006-focus-intro/slide12.html

  12. Solder Jet 25 micron resolution http://www.microfab.com/research_areas/electronics/electronics.htm#anchor250555

  13. Outline • Optical Fabrication Technologies • Probe/MEMS Fabrication Technologies • Imprint Fabrication Technologies • Particle Beam Fabrication Technologies

  14. Cost Per Resolution Element The Case for Printed Electronics …Can we use this map as a guide towards future directions in fabrication?

  15. Imprint Lithography Stephen Chou (Michigan/Princeton) et. al.

  16. Step & Flash Lithography http://www.molecularimprints.com/Technology/technology2.html

  17. MultiLayer Step and Flash Lithography Emerging Lithographic Technologies X, edited by Michael J. Lercel, Proc. of SPIE Vol. 6151, 61510J, (2006) · 0277-786X/06/$15 · doi: 10.1117/12.655604 Proc. of SPIE Vol. 6151 61510J-1

  18. HP – Self Aligned Imprint Lithography - SAIL

  19. 2 mm 200 nm Offset Liquid Embossing (OLE) Nanoparticle Inks Bulthaup et. Al. APL 79(10): 1525 (2001)

  20. Nanomoulding with Amorphous Metals Golden Kumar, Hong X. Tang & Jan Schroers Vol 457| 12 February 2009| doi:10.1038/nature07718

  21. Outline • Optical Fabrication Technologies • Probe/MEMS Fabrication Technologies • Imprint Fabrication Technologies • Particle Beam Fabrication Technologies

  22. Focused Ion Beam FEI Corp.

  23. Focused Ion Beam - Milling NanoLathe FIB Fabricated Stamps http://www.siint.com/en/technology/ion_beam_applications_e.html Toshiaki Fujii, and Takashi Kaito

  24. Au contact pad Pt Pt nanowire SiO2 Pt Focused Ion Beam - Writing FIB Fabricated MOSFET FIB Pt CVD FIB CVD Pt (gate electrode)

  25. E Beam Metal Melting ARCAM.Com

  26. Electrospinning http://www.che.vt.edu/Wilkes/electrospinning/electrspinning.html https://www.uni-marburg.de/fb15/ag-wendorff/research/Electrospinning/fiber-hair http://en.wikipedia.org/wiki/Electrospinning

  27. 1D and 2D Composites

  28. Notes

  29. Objet: Ink Jet + UV Cure 16 micron layers http://www.2objet.com

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