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LIGA and Biophotonics Lab

LIGA and Biophotonics Lab. DEMONSTRATION OF CORTICAL RECORDING AND REDUCED INFLAMMATORY RESPONSE USING FLEXIBLE POLYMER NEURAL PROBES. André Mercanzini, Karen Cheung, Derek Buhl, Marc Boers, Anne Maillard, Philippe, Colin, Jean-Charles Bensadoun, Arnaud Bertsch, Alan Carleton and Philippe Renaud

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LIGA and Biophotonics Lab

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  1. LIGA and Biophotonics Lab DEMONSTRATION OF CORTICAL RECORDING AND REDUCED INFLAMMATORY RESPONSE USING FLEXIBLE POLYMER NEURAL PROBES André Mercanzini, Karen Cheung, Derek Buhl, Marc Boers, Anne Maillard, Philippe, Colin, Jean-Charles Bensadoun, Arnaud Bertsch, Alan Carleton and Philippe Renaud Ecole Polytechnique Fédérale de Lausanne, EPFL, Switzerland University of British Columbia, Vancouver, Canada Massachusetts Institute of Technology, USA NTHU Institute of NanoEngineering and MicroSystem Speaker：Wen Cheng Yang

  2. LIGA and Biophotonics Lab Outline • Introduction • Device fabrication • Device packaging • Electrical characterization • Acute recordings • Histology • Conclusion

  3. Outline • Introduction • Device fabrication • Device packaging • Electrical characterization • Acute recordings • Histology • Conclusion

  4. Introduction • Neural interfaces currently help neuroscientists in their study of the brain’s functions and promise to introduce new solutions for conditions such as Parkinson’s and paralysis. • In order to decrease this response, flexibleprobes have been designed by several groups in order to comply with brain tissue motion. • Polyimide probes and parylene probes have been developed in order to decrease brain-device compliance mismatch.

  5. Introduction Ref：Leigh R. Hochberg, Mijail D. Serruya, Gerhard M. Friehs, Jon A. Mukand, Maryam Saleh,Abraham H. Caplan, Almut Branner, David Chen, Richard D. Penn & John P. Donoghue. “Neuronal ensemble control of prosthetic devices by a human with tetraplegia”. Nature Vol 442.13 July 2006

  6. LIGA and Biophotonics Lab Outline • Introduction • Device fabrication • Device packaging • Electrical characterization • Acute recordings • Histology • Conclusion

  7. LIGA and Biophotonics Lab Step 1： A 500 nm TiW and a 1000 nm sacrificial aluminum layer are deposited on a silicon wafer. Step 2： Polyimide is spun to a thickness of 15 µm Step 3： Ti/Pt/Ti metal sandwich is deposited at thicknesses of 50nm/200nm/50nm respectively. Device fabrication

  8. LIGA and Biophotonics Lab Step 4： A second polyimide layer is spun to a thickness of 2 µm Step 5： A second polyimide Ti/Pt/Ti sandwich is then deposited and etched thus defining the second layer of electrodes. The final polyimide layer is spun to a thickness of 2um Device fabrication

  9. LIGA and Biophotonics Lab Step 6： The three layers of polyimide are then etched in an O2 plasma using the Ti and sacrificial Al as etch stops. The oxide hard mask is dry etched and the wafer is ready for packaging and device release Device fabrication

  10. LIGA and Biophotonics Lab Outline SEM image of the fabricated device.

  11. LIGA and Biophotonics Lab Outline • Introduction • Device fabrication • Device packaging • Electrical characterization • Acute recordings • Histology • Conclusion

  12. LIGA and Biophotonics Lab Device packaging Microscope image demonstrating crossover of metal layers and electrode sites. A packaged flexible neural probe device

  13. LIGA and Biophotonics Lab Outline • Introduction • Device fabrication • Device packaging • Electrical characterization • Acute recordings • Histology • Conclusion

  14. LIGA and Biophotonics Lab Electrical characterization Figure shows the typical impedance spectrum of devices .There was no apparent difference in impedance between the bottom and top metal layers. Impedance magnitude and phase for one electrode site

  15. Outline • Introduction • Device fabrication • Device packaging • Electrical characterization • Acute recordings • Histology • Conclusion

  16. Acute recordings Demonstrates local field potential recordings identifying two single units in the mouse cortex. All 16 electrode sites were active. EEG recordings from 16 electrode sites distinguishing 2 single units

  17. Outline • Introduction • Device fabrication • Device packaging • Electrical characterization • Acute recordings • Histology • Conclusion

  18. Histology General staining for cells with DAPI Staining for microglia, CD11b (green) and astrocytes, GFAP (red).

  19. Outline • Introduction • Device fabrication • Device packaging • Electrical characterization • Acute recordings • Histology • Conclusion

  20. Conclusion • Due to the smaller neural probe size, and brain-probe compliance match, we have demonstrated reduced insertion and chronic damage using polyimide microfabricated probes.

  21. LIGA and Biophotonics Lab Thanks for your attendance .

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