1 / 15

Europe Gases & Liquid Chemicals Committee Report

Europe Gases & Liquid Chemicals Committee Report. Updated October 22, 2014. Leadership. Committee Co-Chairs Jean-Marie Collard, Solvay Chemicals Gordon Ferrier, Gordon F Consulting. Committee Organization. EU Liquid Chemicals & Gases Committee C: Jean-Marie Collard (Solvay Chemicals)

sarthur
Télécharger la présentation

Europe Gases & Liquid Chemicals Committee Report

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. Europe Gases & Liquid Chemicals Committee Report Updated October 22, 2014

  2. Leadership • Committee Co-Chairs • Jean-Marie Collard, Solvay Chemicals • Gordon Ferrier, Gordon F Consulting

  3. Committee Organization EU Liquid Chemicals & Gases Committee C: Jean-Marie Collard (Solvay Chemicals) C: Gordon Ferrier (Gordon F Consulting) VC: Position open Precursor Specifications TF L: Paul Williams (SAFC Hitech) Permeation Tubes for Trace Moisture CalibrationTF L: Jean-Marie Collard (Solvay) L: Jim McKinley (KIN-TEK) Solvents in Advanced Processes TF L: Position open

  4. Meeting Information • Last Meeting • October 7, 2014 at SEMICON Europa, Grenoble, France • Next Meeting • To be announced

  5. Leadership Changes • Vice-Chair of TC • Gumaar De Vos is no longer VC • Position is open • Leader of Solvents in Advanced Processes TF • Gumaar De Vos is no longer leader • Position is open

  6. Ballot Results from Oct 2014 TC meeting • # 5656 Revision to SEMI C65 0308 with title change to: Guide For Trimethylsilane (3MS), 99.995% Quality • Ballot FAILED TC review, will be re-balloted in 2015 with suggested changes • # 5657 Revision to SEMI C66 0308 with title change to: Guide For Trimethylaluminium (TMAl), 99.5% Quality • Ballot FAILED TC review, will be re-balloted in 2015 with suggested changes • # 5658 New Standard: Guide for Pentakis (Dimethylamino) Tantalum (PDMAT) • Ballot FAILED TC review, will be re-balloted in 2015 with suggested changes • #5492 New Standard: Guide for Ethylene Glycol • PASSED as balloted and was submitted to A&R Committee

  7. New SNARFs from Oct 2014 TC meeting • No new SNARFs

  8. Existing SNARFs [1/2] 5325 New Standard: Dimethyl Dimethoxy Silane (DMDMOS) 5491 New Standard: Guide for Titanium Tetrachloride (TiCl4) 5493 New Standard: Guide for Octa Methyl Cyclo Tetra Siloxane (OMCTS)5494 New Standard: Guide for Tetra Methyl Cyclo Tetra Siloxane (TMCTS) 5495 New Standard: Guide for Cyclo Hexanone 5765 Revision to SEMI C15 : Test Method for ppm and ppb humidity standards 5327 New Standard: Guide for Monomethyl Silane 8

  9. Existing SNARFs [2/2] 5656 Revision to SEMI C65 0308 with title change to: Guide For Trimethylsilane (3MS), 99.995% Quality 5657 Revision to SEMI C66 0308 with title change to: Guide For Trimethylaluminium (TMAl), 99.5% Quality 5658 New Standard: Guide for Pentakis (Dimethylamino) Tantalum (PDMAT 9

  10. Upcoming Ballots for 2014 • Ballots up for vote in 2015 • 5765 Revision to SEMI C15 : Test Method for ppm and ppb humidity standards • 5656, 5657, 5658: to be re-balloted in 2015 • Somewhat likely to be presented at next TC meeting: • 5325 New Standard: Dimethyl Dimethoxy Silane (DMDMOS) • 5491 New Standard: Guide for Titanium Tetrachloride (TiCl4) • 5493 New Standard: Guide for Octa Methyl Cyclo Tetra Siloxane (OMCTS) • 5494 New Standard: Guide for Tetra Methyl Cyclo Tetra Siloxane (TMCTS) • 5495 New Standard: Guide for Cyclo Hexanone 10

  11. Precursor Specifications Task Force [1/2] • Leader: Paul Williams (SAFC Hitech) • Standards published : • SEMI C65 Guide for TriMethylSilane (3MS) • SEMI C66 Guide for TriMethylAluminium (TMAl) • SEMI C67 Guide for Hafnium Amides • SEMI C68 Guide for Zirconium Amides • SEMI C73 Guide for Hafnium Tetrachloride • SEMI C74 Guide for Hafnium t-Butoxide • SEMI C75 Guide for Tetrakis(Dimethylamino)Titanium (TDMAT) • SEMI C76 Guide for Zirconium t-Butoxide • SEMI C80 Guide for Tetrakis(Dimethylamino) Silane (TDMAS) • SEMI C81 Guide for Tris(Dimethylamino) Silane (3DMAS)

  12. Precursor Specifications Task Force [2/2] • SNARF’s • 5491 New Standard: Guide for Titanium Tetrachloride (TiCl4) • 5493 New Standard: Guide for Octa Methyl Cyclo Tetra Siloxane (OMCTS) • 5494 New Standard: Guide for Tetra Methyl Cyclo Tetra Siloxane (TMCTS) • 5325 New Standard: Dimethyl Dimethoxy Silane (DMDMOS) • 5658 New Standard : Guide for PDMAT (pentakis dimethyl amino Tantalum) • 5656 Revision to SEMI C65 : Guide for trimethyl silane (3MS) • 5657 Revision to SEMI C66 : Guide for trimethyl Aluminium (TMAl) • 5327 New Standard: Guide for Monomethyl Silane

  13. Solvents in Advanced Processes TF • Leader: Position is currently open • Standards Published: • SEMI C72 : Guide for PGME/PGMEA/mixture • SEMI C84 : Guide for Cyclopentanone • SEMI C85 : Guide for Methyl Isobutyl Carbinol (MIBC) • Standard Re-approved: • SEMI C53: Specifications for Dimethyl Sulfoxide (DMSO) • Standards to be Published After A&R Approval: • SEMI Cxx : New Standard: Guide for Ethylene Glycol • SNARF • 5495 New Standard: Guide for Cyclo Hexanone

  14. Permeation Tubes for Trace Moisture Calibration TF Leaders : Jean-Marie Collard, Solvay Jim McKinley, KIN-TEK SNARF 5765 Revision to SEMI C15 : Test Method for ppm and ppb humidity standards 14

  15. Questions? • Contact • James Amano (jamano@semi.org)/HQ • Kevin Nguyen (knguyen@semi.org)/HQ • Andrea Busch (abusch@semi.org)/Europe

More Related