100+ Axis illumination PowerPoint (PPT) Presentations, Axis illumination PPTs

Axis illumination - PowerPoint PPT Presentation

Introduction and application. Light source and photomask, alignment. Photolithography systems. Resolution, depth of focu

Chapter 5 Lithography. Introduction and application. Light source and photomask, alignment. Photolithography systems. Resolution, depth of focus, modulation transfer function. Other lithography issues: none-flat wafer, standing wave... Photoresist.

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1.05k views • 22 slides

AoE Project

AoE Project. Nano -Process Modeling: Lithography modeling and device fabrication. Philip Chan, Mansun Chan Department of ECE, HKUST. Edmund Lam Department of EEE, HKU. Processing. The role of Processing Modeling. Lithography. Lateral Dimension (and variation). Post-Lithography

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353 views • 21 slides

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Axis illumination - PowerPoint PPT Presentation

Introduction and application. Light source and photomask, alignment. Photolithography systems. Resolution, depth of focu

AoE Project