'Deep reactive ion etching' diaporamas de présentation

Low material budget microfabricated cooling devices for particle detectors

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Introduction to m icrofabrication of solid s tate d evices Maksym Myronov

Introduction to m icrofabrication of solid s tate d evices Maksym Myronov Department of Physics, The University of Warwick, Coventry CV4 7AL, UK October - November 2019. Lectures outline. Introduction Clean rooms Materials and substrates Pattern transfer Etching

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Chapter Extra-2 Micro-fabrication process

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Surface micromachining

Surface micromachining. How a cantilever is made:. http://www.darpa.mil/mto/mems. Sacrificial material : Silicon oxide Structural material : polycrystalline Si (poly-Si) Isolating material (electrical/thermal): Silicon Nitride. Silicon oxide deposition. SiH 4 + O 2.

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Fabrication of MEMS Devices

Fabrication of MEMS Devices. Drew Sellers ELEC 6750 Spring 2004. Questions. What is the difference between anisotropy and isotropy? What are the two steps involved in the Bosch process?. Introduction.

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Instructor: Dr. Cheng Hsien Liu Reported by: Student// Jiuun-Hwa (Tony) Horng

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Critical-Angle Transmission (CAT) Gratings for

Critical-Angle Transmission (CAT) Gratings for High Resolution, Large Area Soft X-Ray Spectroscopy. Ralf K. Heilmann* Mark W. Bautz, MIT John E. Davis, MIT Daniel Dewey, MIT David P. Huenemoerder, MIT Herman L. Marshall, MIT Randall L. McEntaffer , U of Iowa

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Critical-Angle Transmission (CAT) Gratings for

Critical-Angle Transmission (CAT) Gratings for High Resolution, Large Area Soft X-Ray Spectroscopy. Ralf K. Heilmann* Mark W. Bautz, MIT John E. Davis, MIT Daniel Dewey, MIT David P. Huenemoerder, MIT Herman L. Marshall, MIT Randall L. McEntaffer , U of Iowa

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Free-Space MEMS Tunable Optical Filter in (110) Silicon

Free-Space MEMS Tunable Optical Filter in (110) Silicon. Ariel Lipson & Eric M. Yeatman Optical & Semiconductor Group. Imperial College London. Optical & Semiconductor Devices - E.E.E. Dept. Outline. Device - Optical Filter Optical analysis Fabrication. Schematic. Fabricated.

558 views • 18 slides