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Fin width - PowerPoint PPT Presentation


Weekly Group Meeting Report

Weekly Group Meeting Report

Weekly Group Meeting Report. Renjie Chen Supervisor: Prof. Shadi A. Dayeh. Summary. In the past week, I was finishing the samples of high-density neural probes, and starting to work on Ni-InGaAs diffusion study.

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380 views • 10 slides



Research Plan

Research Plan

Research Plan. Temperature Dependence of Ni-InGaAs Reaction. Previous Study: . Fix RTA annealing temperature at 250 ‘C Fin width Dependent ( 50nm, 80nm, 100nm, 120nm, 150nm, 250nm, 550nm ) Time Dependent ( 5min, 20min, 40min, 60min, 90min ). Plan:. Fabrication Flow (time estimation):.

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186 views • 5 slides


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