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Float zone zone refining - PowerPoint PPT Presentation

Silicon crystal structure and defects. Czochralski single crystal growth.

Chapter 3 Crystal growth, wafer fabrication and basic properties of silicon wafers. Silicon crystal structure and defects. Czochralski single crystal growth. Growth rate and dopant incorporation for CZ method. Float zone single crystal growth and doping. Wafer fabrication.

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Float zone zone refining - PowerPoint PPT Presentation

Silicon crystal structure and defects. Czochralski single crystal growth.