Polysilicon layer - PowerPoint PPT Presentation

Microgear Transmission Process Sequence Diagram

Microgear Transmission Process Sequence Diagram. Presented By: Christian Daco James Ford Michael Layman Huey Lee Allan Siu. Starting with a silicon substrate…. Silicon Substrate. 1. LPCVD 2  m layer silicon dioxide (SiO 2 ).

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Dielectric isolation

Dielectric isolation. annealing. - &lt;100&gt; n Si substrate - high energy oxygen ion implantation. - reaction between Si &amp; O - isolation layer. SiO 2. - etching a trench and refilling with oxide. - Creating of n-p-n structure. - high breakdown voltage C-E (several hundreds volts).

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