'Ray lithography' diaporamas de présentation

Fabrication in the nanoscale: principles, technology and applications

Fabrication in the nanoscale: principles, technology and applications. Textbook: Nanofabrication: principles, capabilities and limits, by Zheng Cui Course instructor: Bo Cui Office: EIT 4012 Ext. 38754 Office hour: 11-12pm, Monday & Thursday.

721 views • 47 slides

Types of Nanolithography

Types of Nanolithography. Types of Lithography. A. Photolithography (optical, UV, EUV) B. E-beam/ion-beam/Neutral atomic beam lithography C. X-ray lithography D. Interference lithography E. Scanning Probe Voltage pulse CVD Local electrodeposition

825 views • 42 slides

X-ray lithography (XRL)

X-ray lithography (XRL). Overview and resolution limit. X-ray source ( electron impact and synchrotron radiation). X-ray absorption and scattering. X-ray lithography resist (PMMA and SU-8). X-ray lithography mask (absorber on membrane). LIGA process (for high aspect ratio metal structure).

1.26k views • 40 slides

Tutorial 2

484 views • 38 slides

202 views • 19 slides

X-ray Lithography

X-ray Lithography. physical synthesis of nanostructures. 20 nm. Scott Allen Physics Department University of Guelph. 60 nm. Chen et al., Electrophoresis, 2001. Outline. What is lithography?. What are x-rays?. x-ray lithography (XRL). production of x-rays. x-ray interactions. mask.

347 views • 16 slides

X-ray Lithography

X-ray Lithography. physical synthesis of nanostructures. 20 nm. Scott Allen Physics Department University of Guelph. 60 nm. Chen et al., Electrophoresis, 2001. Outline. What is lithography?. What are x-rays?. x-ray lithography (XRL). production of x-rays. x-ray interactions. mask.

330 views • 16 slides