Sidewall passivation - PowerPoint PPT Presentation

Alumina and Silicon Oxide Sidewall Passivation for P- and N-Type Sensors

Alumina and Silicon Oxide Sidewall Passivation for P- and N-Type Sensors. Marc Christophersen 1 , Bernard F. Phlips 1 , Vitaliy Fadeyev 2 , Hartmut F.-W. Sadrozinski 2 , Colin Parker 2 , Scott Ely 2 , John G. Wright 2 Riccardo Mori 3 , and Matteo Cartiglia 3

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743 views • 34 slides

Alumina and Silicon Oxide Sidewall Passivation for P- and N-Type Sensors

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360 views • 34 slides

Top Down Method

Top Down Method. Plasma Etch and the MATEC Plasma Etcher Simulation. Plasma (dry) Etch Advantages. No need for immersion More precise control of etch feature sizes More rapid than chemical etch without plasma assist Plasma can create reactive species in gases

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417 views • 14 slides

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