Silicon etching - PowerPoint PPT Presentation

Silicon Etching Using Inductively Coupled Plasma Etching

Silicon Etching Using Inductively Coupled Plasma Etching. Drew Sellers ELEC 6750 Spring 2004. Questions. What are the benefits of using inductively coupled plasma etching systems? What are the two different types of inductively coupled plasma coil configurations?. Outline.

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News from IceMOS

News from IceMOS. Alessandro Mapelli CERN PH-DT. frame. baseline. Schedule update December 3 rd. today. Done.. First wafers sent to CERN. Bulk Si vs SOI flows. Silicon Etching. Etch measurements from the first 9 bulk silicon wafers. Channels etch 70um +/- 7um.

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179 views • 6 slides

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