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Grating Coupler Fabrication

Grating Coupler Fabrication. acetone. CF 4. e -. PMMA. Si. SiO 2. Photonic Crystal Fabrication. CF 4. dilute aqua regia. SF 6. e -. PMMA. Mo. Si. SiO 2. Integrated Device. Grating Coupler Geometry. For λ = 1.55 µm, n e = 2.83, and θ = 45°, Λ = 730 nm .

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Grating Coupler Fabrication

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  1. Grating Coupler Fabrication acetone CF4 e- PMMA Si SiO2

  2. Photonic Crystal Fabrication CF4 dilute aqua regia SF6 e- PMMA Mo Si SiO2

  3. Integrated Device

  4. Grating Coupler Geometry For λ = 1.55 µm, ne = 2.83, and θ = 45°, Λ= 730 nm.

  5. Grating Coupler Characterization

  6. PC Waveguide SEM

  7. Integrated Device SEM 730 nm 426 nm 360 nm

  8. AFM of ~10 nm Grating

  9. Coupling Efficiency of ~10 nm Grating

  10. Coupling Efficiency of ~20 nm Grating

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