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Investigation of Stoichiometry and Deposition Characteristics in BSTO Films

This project focuses on analyzing the deposition characteristics and composition correlations of SrTiO3 (STO), BaSrTiO3 (BSTO), and BaSrO3 (BSO) films deposited in a specialized chamber. The study found that the optimal placement of samples is at the chamber's center, and detailed composition tests indicate a clear correlation between plasma power and resulting material composition. Additional measurements, including XRD for lattice spacing and spectroscopic ellipsometry for optical properties, provide insights into the films' characteristics, including potential ferroelectric behavior. Future work includes further impedance measurements and waveguide design enhancements.

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Investigation of Stoichiometry and Deposition Characteristics in BSTO Films

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Presentation Transcript

  1. Project Update 04/17/2014

  2. Stoichiometry by Positioning • To test the deposition characteristics of the chamber, a long sample was placed in the chamber and analyzed at several positions • Best results are obtained when the sample is closest to the center of the chamber.

  3. STO Composition Tests • STO Depositions were performed using a constant Ti plasma and varying Sr power • There is a definite correlation between Sr plasma power and Sr composition in STO

  4. BSO Composition Tests • There is also a correlation between Ba plasma power and Ba composition in BSO

  5. BSTO Composition Tests on Silicon • BSTO with Ba from 0% Ba to 100% Ba. A clear correlation is present between Ba content and lattice constant as expected • WDS confirms exact composition of the films.

  6. BSTO Tests On Silicon • Lattice Spacing by XRD shows a linear increase with increased Ba content

  7. Optical Measurements • Measurements with the spectroscopic ellipsometer show that the films with more barium do have a higher index. • There is not, however, an exact linear correlation between composition and index.

  8. Impedance Spectroscopy • Patterned capacitors to test the impedance of these BSTO films • Capacitance will have a voltage dependence if the films are ferroelectric Cu Ag BSTO AZO Si

  9. Impedance Measurements • Impedance measurements were taken at 100khz • Impedance measurements show some correlation between applied voltage and impedance. This may indicate the presence of ferroelectricity.

  10. Waveguide Design • Created Design in CAD • Based on Previous Design • Also may need revisions if SiO2 is to be used as isolating layer

  11. Future Plans • Impedance measurements on a conductive surface • Make more films to measure impedance • Simulations • Waveguide Fabrication

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