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ITRS Factory Integration

ITRS Factory Integration. Shigeru Kobayashi December 2008 Seoul Korea. 2008 Contributors: Asia

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ITRS Factory Integration

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  1. ITRS Factory Integration Shigeru Kobayashi December 2008 Seoul Korea 2008 Contributors: Asia Seora Park, C. S. Park/ S. H. Park, Kenjiro Nawa, Mikio Otani, Junji Iwasaki, Masazumi Fukushima, Tomoyuki Masui, Michio Honma, Makoto Yamamoto, Nobuo Kanamori, Takayuki Nishimura, Masashi Ohmori, Hiromichi Tani, Shoichi Kodama, Hiroyuki Chuma, Toshiya Hirai, Mikio Furukawa Europe Richard Oeschner, Adrian Pyke, Gavin Rider, Andreas Neuber North America Terry Francis, Gopal Rao, Al Chasey, Les Marshall, Todd Lasater, Brad van Eck, Daniel Babbs, Dave Eggleston, Mutaz Haddadin, Eric Englhardt, Peter Csatary, Bill Fosnight, Tom Jefferson

  2. Factory Integration Scope and Drivers UI FITWG Thrust Teams Factory Operations Production Equipment Factory Information & Control Systems AMHS Facilities Si Substrate Mfg Chip Mfg Wafer Mfg Product Mfg Distribution Reticle Mfg • FEOL • BEOL • Probe/Test • Singulation • Packaging • Test Increasing cost & Cycle time implications • Factory is driven by Cost, Quality, Productivity, Speed, and Flexibility • Reduce factory capital and operating costs per function • Faster delivery of new and volume products to the end customer • Efficient/Effective volume/mix production, high reliability, & high equipment reuse • Enable rapid process technology shrinks as well as systematic productivity waste reduction 2008 ITRS Public Conference Seoul, Korea

  3. Planned Stepwise Productivity Improvement 450mm ? NGF ? • 2008 and future years are targeted to accommodate significant productivity improvement and relevant technology developments Planning for NGF/450mm Start of NGF and/or 450mm Implementation 2008 ITRS Public Conference Seoul, Korea

  4. FI 2008 Focus 2008 ITRS Public Conference Seoul, Korea

  5. What is Waste? 2008 ITRS Public Conference Seoul, Korea

  6. WTW in Dandori Operations and Its Hierarchical Taxonomy 2008 ITRS Public Conference Seoul, Korea Source: J300P Guidelines Phase1

  7. Wait Time Waste as Day / Mask Layer • 2007 Edition introduced elaborated Day/Mask Layer metrics for better cycle time requirement • Set of cycle time metrics: interpreted as fab agility against high/low mix environment or variable lot size manufacturing methods • Super hot lot values provide base line for cycle time metrics • 2009 Edition will add WTW metrics 2008 ITRS Public Conference Seoul, Korea

  8. 2009 FITWG Focus 2008 ITRS Public Conference Seoul, Korea

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