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Thickness and sag of Micron Wedge sensors

Thickness and sag of Micron Wedge sensors. Thickness measurement. Scan sensor on jig with vacuum applied Scan same points on jig alone with vacuum applied Calculate difference for every point The thickness is defined as the mean value of the differences. Sensor 22.

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Thickness and sag of Micron Wedge sensors

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  1. Thickness and sag ofMicron Wedge sensors Manfred Valentan (HEPHY Vienna)

  2. Thickness measurement • Scan sensor on jig with vacuum applied • Scan same points on jig alone with vacuum applied • Calculate difference for every point • The thickness is defined as the mean value of the differences Sensor 22 Final difference valuesplotted on grid Manfred Valentan (HEPHY Vienna)

  3. Sag measurement • Scan sensor with and without vacuum • Scan jig with and without vacuum • Calculate difference: (zsensor_without_vacuum-zsensor_with_vacuum)-(zjig_without_vacuum -zjig_with_vacuum) • The sag is defined as the mean value of the differences Final difference values Sensor 22 without vacuum Manfred Valentan (HEPHY Vienna)

  4. Results Manfred Valentan (HEPHY Vienna)

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