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Variation of Leakage Current Density in Al2O3-Urea Precursor Combustion Across Different Temperatures

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This investigation explores the leakage current density in aluminum oxide (Al2O3) derived from a urea precursor under various combustion temperatures: 250°C, 350°C, 500°C, and 600°C. Additionally, experiments were conducted using aluminum nitrate precursors alone and combined with urea and ammonium nitrate to evaluate their effects on leakage current density. Three rounds of spin coating followed by baking and annealing processes were implemented to enhance film quality before conducting combustion experiments. This study aims to establish optimal conditions for desired electrical properties.

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Variation of Leakage Current Density in Al2O3-Urea Precursor Combustion Across Different Temperatures

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  1. Experiment (Al2O3-urea) Leakage current density (250°C) Reference Combustion

  2. Experiment (Al2O3-urea) Leakage current density (350°C) Reference Combustion

  3. Experiment (Al2O3-urea) Leakage current density (500°C) Reference Combustion

  4. Experiment (Al2O3-urea) Leakage current density (600°C) Reference Combustion

  5. Experiment (Al2O3-urea) Leakage current density (500°C) Combustion Reference

  6. Experiment (Al2O3-urea) Aluminum nitrate only Aluminum nitrate + Urea

  7. Experiment (Al2O3-urea) Aluminum nitrate + Urea + Ammonium nitrate Leakage current density

  8. Experiment (Al2O3-urea) 350°C 비교 Leakage current density Reference Combustion

  9. Experiment (Al2O3-urea) 실험조건 Ref. precursor - Aluminum nitrate Combustion precursor - Aluminum nitrate + Urea + Ammonium nitrate 3회 spin coating Ref. A – Spin coating 후 100°C baking 3회 coating 후 300°C annealing Ref. B – Spin coating 후 300°C annealing 3회 반복 (Combustion A,B도 동일)

  10. Experiment (Al2O3-urea)

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