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2012 Litho ITRS Update

2012 Litho ITRS Update. Lithography TWG July 2012. Outline. Lithography Potential Solutions Major Challenges Some table updates. Litho Team (2012 Meeting attendees shown – there are many other contributors). Updated MPU/DRAM Options. Updated Flash Options.

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2012 Litho ITRS Update

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  1. 2012 Litho ITRS Update Lithography TWG July 2012

  2. Outline • Lithography Potential Solutions • Major Challenges • Some table updates

  3. Litho Team(2012 Meeting attendees shown – there are many other contributors)

  4. Updated MPU/DRAM Options

  5. Updated Flash Options This table shows the requirements for 2-D flash development. The potential introduction of 3-D flash does not drive lithography.

  6. Updated Challenges

  7. Highlighted Table Changes • We will create a lithographic materials challenges table and work jointly with ERM group on these needs • Multiple patterning table will be changed to reflect typical industry pitch splitting practice. • Will start assessing DSA capabilities to meet litho roadmap requirements

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