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Precision Systems Control Laboratory (PSCL)

Precision Systems Control Laboratory (PSCL). Jia-Yush Yen. Recent Projects. 70,950 cross-wafer beams 1-mm beam pitch. Massively Parallel E-Beam Lithography System. 子計劃一：資料傳輸與控制驅動系統. 子計劃二：電子光學系統設計與製作. 子計劃三：機械系統設計與製作. 子計劃四：低電壓電子束微影製程. 2.

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Precision Systems Control Laboratory (PSCL)

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  1. Precision Systems Control Laboratory (PSCL) Jia-Yush Yen

  2. Recent Projects 70,950 cross-wafer beams 1-mm beam pitch • Massively Parallel E-Beam Lithography System 子計劃一：資料傳輸與控制驅動系統 子計劃二：電子光學系統設計與製作 子計劃三：機械系統設計與製作 子計劃四：低電壓電子束微影製程 2

  3. Zone-Plate Based EUV Direct Write Lithography System

  4. (a) (b) Artificial Eye

  5. Nano-Pattern Stitching

  6. AFM Manipulation or Nano Manufacturing

  7. Experiment hardware - Two Adlink I/O card (9111DG、6308V) - Pentium PC

  8. Result of spiral flat with PID controller

  9. Result of spiral flat with PID controller

  10. Spiral Line

  11. Lithography skill by PI

  12. Nano-line method(2)

  13. Nano-point method(1) By Nano-line(1) combine a circle

  14. Combine nano-line(2) method

  15. Bio-mimetic Robots

  16. Bio-mimetic leg design

  17. Modifications • Aluminum alloy legs • Acrylic body

  18. Turtle test platform

  19. Real Module NTU PSCL

  20. Real Module NTU PSCL

  21. Wireless Health Monitoring Device

  22. Mobile device RF Transceiver Health Care Center One Very Brief Review 802.11b ARM9 Development Board (running WinCE) RS232 RF sensor sensor sensor

  23. Hardware • Symbian OS was chosen for its open-minded architectures. • I chose N95 for its mobility and connectivity.

  24. I/O problem Q1：USB-Host or USB-OTG A1：Reprogrammed to Bluetooth protocol. or Ask Project-F to use USB-Host driver chip.

  25. New Smart Solar Brick

  26. Solar tracker Color solar cell Smart brick Solar power Optical fiber lighting Optical fiber Hydrogen generator

  27. Optical fiber Area :20cm x 40 cm Solar cell Smart brick integration

  28. New visible light absorbing oxides • UV-Vis absorption spectra of: • SrTiO3 • Mixture of (0.75AgNbO3 + 0.25SrTiO3) • Solid solution (Ag0.75Sr0.25)(Nb0.75Ti0.25)O3 • AgNbO3 (Ref: J. AM. CHEM. SOC. 130, 2724-2725, 2008) Bias Light & Heat “Photovoltaic effect” Composite film structure + - Bias from solar cell Photoelectrolysis H2 generation at Pt cathode e- Rectifier circuit TiO2 nanotubes “Pyroelectricity” PZT thin film Task 1: New oxide materials Task 2: Photovoltaic + Pyroelectricity Composite film structure at anode

  29. Machine Tool Servo Design

  30. New Design Procedure Specifications CAD tool Servo implementation Prototyping Structural analysis tool Servo tuning Modal testing Controller synthesis tool Performance test Dynamic simulation tool

  31. Integrated System Model Solid model for the Grinding Machine

  32. 無擋板下之受力變形

  33. 強韌性驗證 • 改變平台的負載 • O：總重800kg • +：總重750kg • －：總重703kg • 調整輸入增益 • O：1.2倍 • +：0.8倍 • －：原輸入增益

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