Piezoelectric Displacement Results of Measuring Pt/PNZT/Pt Capacitor on Seiko Instruments SPA400 AFM. Radiant Technologies, Inc. August 7, 2001
Sample Description • Capacitor Area: 12µ x 12µ • Construction: Pt/PNZT/Pt • Composition: 4/20/80 PNbZT • PNZT Thickness: 1µm
Displacement at 40V Displacement measured at 40Vwith a measurement period of 1 second.
Displacement at 40V Displacement loop averaged 10 times.
Nested Displacement Loops Displacement measured at 40V, 30V, 20V, and 10V. Measurement period is 1 second.
Conclusion • Precision Premier integrates with the Seiko Instruments AFM family to collect displacement measurements of thin ferroelectric films. • The 1µm thick Radiant 4/20/80 PNbZT film displaced 23Å at 40V giving the film a d33 value of 57.5. • The measured value is the not the true d33value of the film due to strong clamping by the substrate. • Piezoelectric fatigue, frequency response, and imprint can also be measured using the Vision software.