Defects and Disorders in Semiconductors
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Defects and Disorders in Semiconductors. Jermell Powell ECE 423 11/15/06. Defect types. Point defects Line defects Area defects Cluster defects. Point defects. Types Frenkel defect pair. Line defects. Example. Wide defects. Area defect Epitaxial mound Cluster defect Dust particle
Defects and Disorders in Semiconductors
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Defects and Disorders in Semiconductors Jermell Powell ECE 423 11/15/06
Defect types • Point defects • Line defects • Area defects • Cluster defects
Point defects • Types • Frenkel defect pair
Line defects • Example
Wide defects • Area defect • Epitaxial mound • Cluster defect • Dust particle • Mask scratch
Defect density • d(r) = d{1 + 2.5 exp [0.34 X 19(1 - r/R)]}
Causes of defects • Semiconductor doping • Czochralski method
Advanced defects • Antisite • Nonstoichiometric • Void defects
Divacancy • Cause • Effect • V-V + Isi -> V-V + Isi • V-V + Isi -> V • V-V + 2Isi -> V-V + 2Isi • V-V + 2Isi -> V + Isi • V-V + 2Isi -> 0
Results • Positive • Oxygen in Silicon • Lifetimes • Diffusion lengths • Mobilities • Solar cells, IC
ZnTe and CdTe • Chlorine doping • Copper doping • GaAs, Arsenic heavy
Detrimental • Categories of Inoperability • Oxygen in Silicon • Dielectric breakdown
Questions? • Thank you
