1 / 11

LI LI Tongji University

Dispatching Rule Considering Time-Constraints on Processes for Semiconductor Wafer Fabrication Facility. LI LI Tongji University. Content. Problem description Dispatching Rule Considering Time-Constraints on Processes Simulations Conclusions. Problem Description.

dani
Télécharger la présentation

LI LI Tongji University

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. Dispatching Rule Considering Time-Constraints on Processes for Semiconductor Wafer Fabrication Facility LI LI Tongji University

  2. Content • Problem description • Dispatching Rule Considering Time-Constraints on Processes • Simulations • Conclusions

  3. Problem Description • Dispatching with time-constraints on the processes • the requirements on the • delivery of jobs • high utility and workload • balance of machines with time- • constraints requirements of • processes • guarantee the yields of lots • increase the movements of jobs • to utilize its capacity efficiently Figure 1 An example of a job with time-constraint

  4. Dispatching workflow The Workflow of DRTC

  5. Dispatching workflow • For non-BPM, the selection probability of job n is set to • For BPM, the selection probability of job n is set to

  6. Simulations 1 Table 1 Time-constrain of Metal Sputtering Table 2 Time-constraint of BPSG

  7. Simulations 1 P-M-Avg.: average proportion of the jobs satisfying TC-M P-B-Avg.: average proportion of the jobs satisfying TC-B MOVE -Avg.: average movements of the qualified jobs during one week Values of parameters impact the performance of DRTC critically

  8. Parameter Optimization The workflow to determine the parameter values of DRTC

  9. Simulations 2

  10. Conclusion • A dispatching rule considering the time-constraints on processes is proposed in this paper. • We also introduce how to determine its parameters to obtain better performance. • However, our work doesn’t relate these parameters to running information of a fab, and the latter is anticipated to be better than the former. • Our future work is to link these parameters with running information to realize its adaptability to changing environments.

  11. Thank You !

More Related