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기판 (substrate)

신규모듈 : 2-D RHT (Radiative Heat Transfer). 용기내의 방사형 열 이동에 의한 가스 온도의 계산 용기 벽과 기판 (substrate) 에 대하여 방사형 열 이동에 대한 열 흐름 (flux) 의 계산. 가스 온도 ?. 기판 (substrate). 증발 입자. 도가니. 1) Calculate gas temperature by radiative heat transfer in the chamber.

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기판 (substrate)

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  1. 신규모듈 : 2-D RHT (Radiative Heat Transfer) • 용기내의방사형 열 이동에 의한 가스 온도의 계산 • 용기 벽과 기판(substrate)에 대하여 방사형 열 이동에 대한 열 흐름(flux)의 계산 가스 온도? 기판(substrate) 증발 입자 도가니

  2. 1) Calculate gas temperature by radiative heat transfer in the chamber. 2) Calculate heat flux by radiative heat transfer to the substrate and the chamber wall. Gas temperature Substrate Evaporation particles Crucible

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