1. SUGAR: A MEMS Simulatorwww.sourceforge.net/projects/mems David Bindel, Jason V. Clark, David Garmire, Babak Jamshidi, Shyam Lakshmin, Jiawang NieAlice Agogino, Zhaojun Bai, James Demmel, Sanjay Govindjee, Ming Gu, Kristofer S.J. Pister • Our goal: Be SPICE to the MEMS world • Provide quick simulations for tight design loop • Use structural elements like beams and plates, circuit elements, and elements that capture coupled effects • Be sufficiently simple to use for brainstorming • Be a building block for design synthesis and other simulation-intensive activities • Provide framework for measurement comparison to validate existing models, derive new models, and extract physical parameters

2. SUGAR Data Flow • Users describe devices using text netlists • Models written in C or Matlab describe netlist components • Global equations assembled from local model equations • Solvers analyze the global equations • Users invoke solvers from Matlab, Lua, the web, or other programs Netlist Models Assembly Solvers User Interfaces

3. SUGAR in Action • Continuum element discretization might use O(106) DOF • SUGAR model is 10K DOF • Described with a few parameterized subnets • Simulated frequency response of micromirror took ~30 sec using model reduction techniques

4. Measurement Feedback • User interface prototyped and measurement code improved (to > 1 frame/sec) • Optical measurement facilities provided by Muller’s Matisse group • Validate simulations by comparison to measured data and improve models

5. M&MEMS: SUGAR on the Web • Hosted on Berkeley Millennium cluster • Requires only a browser • Version 2.0 used in Fall 2001 MEMS course • Version 3.0 will be used in Fall 2002 MEMS course

6. Recent Progress • SUGAR 3.0 • Initially released 4/5/2002 • Core functionality moved from Matlab to C/C++ • Model development • Almost all SUGAR 2.0 models ported • Beam model with anisotropic warping effects (in testing) • Plate model with condensation of internal degrees of freedom (in testing) • Numerics • Model reduction for fast frequency-response • SuperLU for linear solves