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FVTX Strip Sensor Design

FVTX Strip Sensor Design. General features: Strip pitch = 75 µm # chip channels = 128;  chip width = 128 x 75 µm = 9600 µm Forward disk radial coverage (cca) = 17.0 – 4.5 cm = 12.5 cm # of chips = 12.5 cm/0.960 cm = 13 chips

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FVTX Strip Sensor Design

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  1. FVTX Strip Sensor Design General features: • Strip pitch = 75 µm • # chip channels = 128;  chip width = 128 x 75 µm = 9600 µm • Forward disk radial coverage (cca) = 17.0 – 4.5 cm = 12.5 cm • # of chips = 12.5 cm/0.960 cm = 13 chips • azimuthal coverage is by 48 wedges; each wedge covers angle of 7.5º + 2 x 0.5 mm overlap • each wedge consists of two symmetric parts (each covering 3. 75º) + 2 x 0.5 mm overlap • to place on 4” wafer: 2 types of wedges are needed: inner and outer (next page) • the inner wedge is 7 chips long in the radial direction, the outer wedge is 6 chips long Vaclav Vrba, Prague

  2. Narrow and wide wedges Four inner wedges on a wafer Three outer wedges on a wafer Vaclav Vrba, Prague

  3. Inner and outer wedges inner outer Vaclav Vrba, Prague

  4. Wedge layout Zoom in … one chip bonding pads testing pads (both staged) Guard ring Cutting edge Vaclav Vrba, Prague

  5. 4 chips prototype Zoom in … a) one chip b) Cutting edge Vaclav Vrba, Prague

  6. 6 inches wafer – 3 wedges Vaclav Vrba, Prague

  7. 6 inches wafer – 4 wedges Vaclav Vrba, Prague

  8. Conclusions • ccc Vaclav Vrba, Prague

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