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Fiber Patterning

This project focuses on innovative fiber patterning methods aimed at enhancing optical fibers' capabilities. The primary goals include depositing coplanar electrodes on fiber surfaces to serve as a mask for core removal and replacing it with an electro-optic polymer waveguide. Essential equipment like pattern generators, mask aligners, and etching systems are utilized. Processes such as photolithography, chemical etching, and RIE are critical for achieving precise fiber modifications. The integration of bonding pads and voltage application to electrodes is also examined, supporting the development of advanced electro-optic devices.

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Fiber Patterning

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  1. Fiber Patterning • Project goals: • Deposit coplanar electrodes on the surface of an optical fiber • Use these electrodes as a mask to remove the optical core and replace it with an electro-optic polymer waveguide • Remove excess polymer from surface of fiber • Develop system to attach voltages to the electrodes MME Project: Fiber Patterning

  2. Equipment and Processes Equipment • Pattern generator • Canon mask aligner • E-beam evaporator • Bruce Furnace. • PECVD • Matrix Etcher • RIE MME Project: Fiber Patterning

  3. Equipment and Processes Equipment Processes • Pattern generator -Chemical etching • Canon mask aligner -Photolithography • E-beam evaporator -SEM imaging • Bruce Furnace -Growth of nitrides • PECVD • Matrix Etcher • RIE MME Project: Fiber Patterning

  4. Procedure: Wafer island MME Project: Fiber Patterning

  5. Procedure: V-Groves SEM image MME Project: Fiber Patterning

  6. Procedure: V-Groves MME Project: Fiber Patterning

  7. Procedure: photolithography MME Project: Fiber Patterning

  8. Procedure: Access to the core • D-surface must be level with the core. Two reasons: • We want to remove the core • The electrodes will create an E-field strongest at their center • Fiber section dipped in HF for 20 min. E-Field MME Project: Fiber Patterning

  9. Procedure: Bonding pads • We’ve got to put a voltage on the electrodes Glass Key Section of replaced core 2 cm. MME Project: Fiber Patterning

  10. Results so far MME Project: Fiber Patterning

  11. Results so far SEM Image MME Project: Fiber Patterning

  12. MME Collaboration • New mask: • New design with bonding pads: Cadence • Pattern generator • Photolithography: Photoresist/Polymer application and adhesion • SEM characterization • RIE Etching MME Project: Fiber Patterning

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