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Precision Linear Motorized Stages

Precision Linear Motorized Stages. Proteep Mallik OPTI 521 Tutorial Presentation December 4, 2006. Precision Linear Motorized Stages. Long travel (~2m) High precision (~nm level) Stepper drives Parker Motion products. Motion Control what, where and why? System Components

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Precision Linear Motorized Stages

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  1. Precision Linear Motorized Stages Proteep Mallik OPTI 521 Tutorial Presentation December 4, 2006

  2. Precision Linear Motorized Stages • Long travel (~2m) • High precision (~nm level) • Stepper drives • Parker Motion products OPTI 521 Tutorial Presentation

  3. Motion Control what, where and why? System Components stage (long range) motor (servo vs stepper) controller computer/software Examples vendors specifications cost Parker Motion System Linear sliders and stages 6K controller Computer & monitor Null test system Conclusions Outline OPTI 521 Tutorial Presentation

  4. Motion Control • Precise positioning of optics and mechanics • Used in: • laser machining, welding • printing, patterning • wafer fabrication, lithography • robotics • … and of course, in many optical systems OPTI 521 Tutorial Presentation

  5. Motion Control • Why motorized? • repeatable, precise and smooth • moving heavy parts • automation • easy to manage complex systems • less manpower OPTI 521 Tutorial Presentation

  6. System Components-overall system ROTARY BRAKE SHAFT BRAKE OPTI 521 Tutorial Presentation

  7. System Components-stage • Range of travel (~ 2m) • Precision (~ nm) • Repeatability (~ sub nm) • Stiffness (extruded Al, excellent) • Motor requirements (torque, efficiency) • Cost (~$5000) • Ease of operation (cabling, computer control) • Mount on large, flat surface (minimum deflection) OPTI 521 Tutorial Presentation

  8. System Components-motor • Servo • Ironcore, ironless, slotless • Typical repeatability ~1nm, resolution ~0.01nm • Needs position encoders • Very smooth, fast motion for large loads • AC or DC, high voltage • Expensive (~$5000 +) • Stepper • Multi-pole motors • N-bit encoders (2N bits/step) • Repeatability ~10nm, resolution ~sub nm • No need for position encoder • Easier maintenance and lower cost than servo OPTI 521 Tutorial Presentation

  9. System Components-controllers • Interfaces user to linear stage • via computer or remote control • Drive, encoder, limit and communication inputs • Programmable OPTI 521 Tutorial Presentation

  10. System Components-computer • RS-232 or ethernet communication • Software from manufacturer • Programming via Active X or other windows platforms • Industrial computers, touchscreen control monitors OPTI 521 Tutorial Presentation

  11. Vendors • Parker Automation (Parker Hannifin, Daedal Positioning, Compumotor) • Aerotech • Velmex • Newmark OPTI 521 Tutorial Presentation

  12. Aerotech (servo) Parker (stepper) Velmex (stepper) ALS5000 ABL2000 400ST 406XR XSlide BiSlide Total Travel 1m 1.2m 1.5m 2m 0.8m 2m Resolution 0.001μm 0.06nm (not given) (not given) 6μm Repeatability 0.5μm 0.4μm 0.1nm 1.3μm 2.5μm 4μm Max Load 135kg 50kg 1000kg 630kg 16kg 150kg Cost $15,000 $25,000 $2000 $5000 $800 $1800 Image Specifications OPTI 521 Tutorial Presentation

  13. Parker Automation www.parkermotion.com OPTI 521 Tutorial Presentation

  14. Parker Automation • Workstations • Ethernet communication with controllers • Controllers can be used in client-server modes • Controllers can be connected to each other via ethernet hub • Touchscreen monitors OPTI 521 Tutorial Presentation

  15. Null Test System 3-axis stage Tilt stage CGH positioning stage OPTI 521 Tutorial Presentation

  16. Input Power Supply Drivers (7) 6K8 Controller Computer communication Null Test System • 5A drivers/motors • 20A, 120V AC input power OPTI 521 Tutorial Presentation

  17. Conclusions • Precision motion control a reality and necessity • 3 choices to make: stage, motor, controller • Complete automation via computer and available software OPTI 521 Tutorial Presentation

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