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Precision Linear Motorized Stages

OPTI 521 Tutorial Presentation. 2. August 28, 2012. Precision Linear Motorized Stages. Long travel (~2m)High precision (~nm level)Stepper drivesParker Motion products. OPTI 521 Tutorial Presentation. 3. August 28, 2012. Outline. Motion Controlwhat, where and why?System Componentsstage (long ra

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Precision Linear Motorized Stages

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    1. Precision Linear Motorized Stages Proteep Mallik OPTI 521 Tutorial Presentation December 4, 2006

    2. OPTI 521 Tutorial Presentation 2 August 28, 2012 Precision Linear Motorized Stages Long travel (~2m) High precision (~nm level) Stepper drives Parker Motion products

    3. OPTI 521 Tutorial Presentation 3 August 28, 2012 Outline Motion Control what, where and why? System Components stage (long range) motor (servo vs stepper) controller computer/software Examples vendors specifications cost Parker Motion System Linear sliders and stages 6K controller Computer & monitor Null test system Conclusions

    4. OPTI 521 Tutorial Presentation 4 August 28, 2012 Motion Control Precise positioning of optics and mechanics Used in: laser machining, welding printing, patterning wafer fabrication, lithography robotics and of course, in many optical systems

    5. OPTI 521 Tutorial Presentation 5 August 28, 2012 Motion Control Why motorized? repeatable, precise and smooth moving heavy parts automation easy to manage complex systems less manpower

    6. OPTI 521 Tutorial Presentation 6 August 28, 2012 System Components -overall system

    7. OPTI 521 Tutorial Presentation 7 August 28, 2012 System Components -stage

    8. OPTI 521 Tutorial Presentation 8 August 28, 2012 System Components -motor Servo Ironcore, ironless, slotless Typical repeatability ~1nm, resolution ~0.01nm Needs position encoders Very smooth, fast motion for large loads AC or DC, high voltage Expensive (~$5000 +) Stepper Multi-pole motors N-bit encoders (2N bits/step) Repeatability ~10nm, resolution ~sub nm No need for position encoder Easier maintenance and lower cost than servo

    9. OPTI 521 Tutorial Presentation 9 August 28, 2012 System Components -controllers

    10. OPTI 521 Tutorial Presentation 10 August 28, 2012 System Components -computer

    11. OPTI 521 Tutorial Presentation 11 August 28, 2012 Vendors Parker Automation (Parker Hannifin, Daedal Positioning, Compumotor) Aerotech Velmex Newmark

    12. OPTI 521 Tutorial Presentation 12 August 28, 2012 Specifications

    13. OPTI 521 Tutorial Presentation 13 August 28, 2012 Parker Automation

    14. OPTI 521 Tutorial Presentation 14 August 28, 2012 Parker Automation

    15. OPTI 521 Tutorial Presentation 15 August 28, 2012 Null Test System

    16. OPTI 521 Tutorial Presentation 16 August 28, 2012 Null Test System

    17. OPTI 521 Tutorial Presentation 17 August 28, 2012 Conclusions Precision motion control a reality and necessity 3 choices to make: stage, motor, controller Complete automation via computer and available software

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