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Advisor: Prof. C.H. Liu

Advisor: Prof. C.H. Liu. UNIVERSAL CONCEPT FOR FABRICATING ARBITRARY SHAPED μIPMC TRANSDUCERS AND ITS APPLICATION ON DEVELOPING ACCURATELY CONTROLLED SURGICAL DEVICES. MEMS2007 Page:32. Gou-Hua Feng and Ri-Hong Chen

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Advisor: Prof. C.H. Liu

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  1. Advisor: Prof. C.H. Liu UNIVERSAL CONCEPT FOR FABRICATING ARBITRARY SHAPED μIPMC TRANSDUCERS AND ITS APPLICATION ON DEVELOPING ACCURATELY CONTROLLED SURGICAL DEVICES MEMS2007 Page:32 Gou-Hua Feng and Ri-Hong Chen Department of Mechanical Engineering, National Chung Cheng University Reporter: sang-chung yang(楊善淳)

  2. Outline • Introduction • Working principle • Fabrication • Testing • Results • Conclusions

  3. Introduction 內視鏡手術傷口 傳統手術傷口 0.5~1cm 10cm Ref: JiannJiann-Liang Chen MD, PhD 內視鏡手術用的工具 Ref: Gou-Hua Feng

  4. Introduction IPMC:Ionic polymer metal composites 離子交換膜在燃料電池的應用 離子交換膜在IPMC的應用 Ｐt Nafion Ref: Yung Yuen CO Ref: Gou-Hua Feng

  5. Working principle Working principle of an IPMC transducer: (Left) No voltage is applied. (Right) Voltage isapplied to cause IPMC bending. V=5 V=0 Ref: Byungkyu Kim et al,2003 R:reaction force E:young’s modulus I:inertia δmax:maximum deplacement at tip L:length of IPMC

  6. Fabrication μIPMC fabrication method 1 Process flow diagrams for fabricatingμIPMC transducers with MEMS parallel processing spirit.

  7. Fabrication μIPMC fabrication method 2 Fabrication process flow diagram for the production of IPMC transducers It’s different compare to method1. 1.Substrate 4.Remove wax 5.Pattern PR 9.Immersion into NaOH 2.Apply Wax 6.Spray Nafion 7.Remove parylene 10.After 3 hours 3.Deposit parylene-c 8.Deposit Pt Ref: Gou-Hua Feng et al, 2007

  8. Fabrication Photograph of negative photoresist JSR-made micromold array on bulk-micromachined SiN diaphragms. Photograph of diluted Nafion solution sprayed to fill up the micromolds

  9. Fabrication (Top) Individual devices of IPMC transducers with platinum electrodes simultaneously formed on top and bottom surfaces. (Bottom right) Cross-sectional view of the device with a clear edge that no short-circuits occur. (Bottom left) A newly developed device with varied thickness

  10. Testing Experimental setup for measuring force output of the device with a high-resolution (0.01 mN) electronic balance. Experimental setup for measuring displacement of actuated IPMC transducers.

  11. Results Relationship between the displacement and frequency.

  12. Results Results of instantaneous maximum output force vs. applied voltage for 0.5, 1, and 1.5 Hz.

  13. Results Demonstration of the IPMC transducer gripping a flexible tube (Left: Front view; Bottom right: side view).

  14. Conclusions • IPMC這種材料其實是在離子交換膜兩面鍍金屬後成類似三明治的結構，依輸入的電壓大小、頻率、波形產生不同形變的致動器，因為離子交換膜通常是含水的狀態，是不是有水解的情況發生 ? • 位移的響應時間是否足夠快？ • IPMC 表面阻抗、含水量及電場分佈情形都會對其性能產生影響，表面阻抗愈低以保持含水量愈多皆可提昇其性能，而電場分佈與形變時之幾何形狀有關，因此較難掌握 • 結構強度的問題。 • IPMC是含水的致動器，可用來做為水下彷生的機器人

  15. Introduction Ref: 朱銘祥 Ref: Byungkyu Kim et al,2003

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