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L=200nm t =4nm

Dynamics of Strained Film Growth on Vicinal Substrates M. Yoon 1,2 , W. Hong 3 , H.N. Lee 1 , H. M. Christen 1 , Z. Suo 3 , Z. Zhang 1,2 1 O ak R idge N ational L aboratory , 2 The University of T ennessee , 3 Harvard University.

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L=200nm t =4nm

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  1. Dynamics of Strained Film Growth on Vicinal SubstratesM. Yoon1,2, W. Hong3, H.N. Lee1, H. M. Christen1, Z. Suo3, Z. Zhang1,21 Oak Ridge National Laboratory, 2The University of Tennessee,3 Harvard University We propose a model of persistent step flow, emphasizing dominant kinetic processes and strain effects.Within this model, we construct a morphological phase diagram, delineating a regime of step flow fromregimes of step bunching and island formation. In particular, we predict the existence of concurrent stepbunching and island formation, a new growth mode that competes with step flow for phase space, and show that the deposition flux and temperature must be chosen within a window in order to achievepersistent step flow. The model rationalizes the diverse growth modes observed in pulsed laser deposition of SrRuO3 on SrTiO3. [W. Hong, H.N. Lee, M. Yoon, H. M. Christen, D. H. Lowndes, Z. Suo, Z. Zhang, Phys. Rev. Lett. 95, 095501 (2005)]

  2. L=200nm t=4nm L=400nm t=10nm L=400nm t=40nm L=200nm t=10nm When a heteroepitaxial film is grown on a vicinal substrate, the terrace steps at the growth front may bunch together to relieve strain, resulting in a rough surface. On the other hand, proper manipulation of the growth kinetics may suppress the inherent bunching instability, thus preserving step-flow growth. Here we show that the step dynamics in the early stages of growth can already determine whether the bunching instability is truly suppressed, prior to bunching actually taking place in the unstable regime. We determine the critical film thickness above which steps will bunch and exploit its scaling properties and usefulness for extracting intrinsic energy parameters. Experimental studies of SrRuO3 films grown on vicinal SrTiO3 substrates clearly establish the existence of the critical film thickness in step bunching. A schematic view of the critical thickness tc as a function of the average terrace width L.. Experimental confirmation of the existence of critical thickness [M. Yoon, H.N. Lee, W. Hong, H. M. Christen, Z. Zhang, Z. Suo, Phys. Rev. Lett. 99, 055503 (2007)]

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