Layer growth - PowerPoint PPT Presentation

Atomic Layer Deposition for SRF Cavities

Atomic Layer Deposition for SRF Cavities. Jeff Elam , Michael Pellin Jerry Moore*, Jim Norem Argonne National Laboratory Claire Antoine CEA Saclay/Fermi *also MassThink. SRF Materials Workshop FNAL, May 23-24, 2007. Outline. What is Atomic Layer Deposition (ALD)?

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ALD Thin Film Materials

ALD Thin Film Materials. LDRD review 2009. NuFact09. ALD of III-V semiconductors and other structure/materials. What have been done: - GaN - AlN - AlGaN - InN Not too hard for InGaN -TiO 2 - ZnO Other: Pt nanoparticles Ag nanoparticles. Cutoff at 380 nm, up to 50% QE at 310 nm.

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C. B. B. C. B. B. A. A. C. A. A. A. A. A. A. A. B. B. B. B. C. A. A. B. B. B. B. B. B. B. C. A. A. B. B. C. C. C. B. B. Weak Adsorption on Complex Surfaces. Renee D. Diehl, Penn State, DMR 0505160.

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Stanford University MRSEC 0213618 IRG 3

138 views • 1 slides