1. ESD SYSTEM OVERVIEW Transport rod 1 Cu Sample Butterfly valve 2 Bias Sample Sample Holder plate Electrometer RGA B-A gauge Pumping group Filament Conductance Gas Injection Line Filament Power Supply Full Range Gauge Bias Filament

2. ESD SYSTEM OVERVIEW

3. Cu SAMPLES

4. Cu Samples Heat treatment Machining Cleaning ESD main steps:   

5. Bake – out: lower part 9 8 6/11 7 1 2 3 5 10 4

6. Bake – out: upper part 3B 2B 4B 1B

7. RGA scans

8. RGA scans (valve closed)

9. Circuit 35 KV V 2-3 A A +15 V V A

10. Degassing: 9 Cycles @ 0.35KV

11. Degassing: 9 Cycles @ 0.70KV

12. Degassing: 9 Cycles @ 1.5KV

13. Calibration: H2 Calibration Factor

14. Calibration: N2 Calibration Factor

15. Calibration: N2 2nd set of data Calibration Factor

16. Degassing: 30 Cycles @ 0.35 KV

17. CURRENT!!!!!

18. Desorption Yield

19. Desorption Yield • 15 RGA Cycles for background Signal + biassing of the sample • 15 RGA Cycles with the filament switched on • filament + sample degassing

20. Desorption Yield • switch on the filament • 15 RGA Cycles for background pressure • 15 RGA Cycles with the sample biased