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So What Makes LOT Vacuum Pumps so Tough ?

So What Makes LOT Vacuum Pumps so Tough ?. It’s the Split Flow Design. Short gas path length PFPE-cooled rotors Piston ring shaft seals Simply supported bearings Shaft axial load minimization PFPE lubricated bearings Parts simplicity. DD105 Series 1 st Gen. LD / HD Series 3 rd Gen.

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So What Makes LOT Vacuum Pumps so Tough ?

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  1. So What Makes LOT Vacuum Pumps so Tough ?

  2. It’s the Split Flow Design • Short gas path length • PFPE-cooled rotors • Piston ring shaft seals • Simply supported bearings • Shaft axial load minimization • PFPE lubricated bearings • Parts simplicity

  3. DD105 Series 1st Gen. LD / HD Series 3rd Gen. DD255 Series 2nd Gen. • Hybrid screw rotor • Direct motor Drive • Frequency converter • High Capacity • Epoxy potted AC Synchronous Motor • Hybrid screw rotor • Direct motor Drive • Frequency converter • High Energy Efficiency • Hybrid screw rotor • Pumping 2 X DD105 • Indirect motor Drive • Herringbone screw rotor • Indirect Motor Drive Rotor Development: All Series Supported GHD Series 4th Gen:

  4. DD and GHD Series: PFPE Cooled Rotors PFPE travels through rotors eliminating hot spots and regulates temperature Heat Exchanger PFPE Lubricant Pump Aux Heat Exchanger

  5. PFPE Lubricated Bearings

  6. Rotor Temperature Distribution

  7. Piston Ring Sealing Mechanism:

  8. Benefits of Split Flow Design

  9. Simply Supported vs. Cantilever

  10. Gases from chamber N2 N1 N1 N2 N4 N3 N2 Purge Paths N1: Dilution N2: Piston Ring Purge N3: Exhaust Port Purge N4: Exhaust Line Purge N3 and N4 Heated as needed per application

  11. Parts Comparison

  12. LOT Pump IO Interface CONTROL BOARD Tool (AMAT) Device Net LONWORKS PC104 Connector Tool Fab Network TOOLINTERFACE Ethernet HD and LD Tool Tool (RS232C or RS485) External Serial Converter SERIAL (UART) SERIAL (RS-232C) • Tool/Pump interface available through Relay, Serial and DeviceNet

  13. Product Application Guide Resist Strip Load Lock Oxide Etch Metal Etch He and H2 PE-TEOS HDP CVD Poly Etch Transfer Implant SA CVD PE CVD LP CVD Ashing W CVD ALD SEM LD-L Series LD-P Series HD Series DD Series GHD Series

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