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52300 Sensing and Actuation in Miniaturized Systems

52300 Sensing and Actuation in Miniaturized Systems. Topics ： Microlens array bio-sensing system. Professor ： Cheng-Hsien  Liu Students ： Den-Hua Lee Tsu-Wei Huang. Contents. Introduction The Goal Discussion Conclusion. Introduction.

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52300 Sensing and Actuation in Miniaturized Systems

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  1. 52300Sensing and Actuation in Miniaturized Systems Topics： Microlens array bio-sensing system Professor：Cheng-Hsien  Liu Students：Den-Hua Lee Tsu-Wei Huang

  2. Contents Introduction The Goal Discussion Conclusion

  3. Introduction Improved light out-coupling in organic light emitting diodes employing ordered microlens arrays. 2002 A novel method to fabricate gapless hexagonal micro-lens array. 2004 Microlens array film with full fill factor for enhancing outcoupling efficiency from OLED lighting. 2007

  4. Improved light out-coupling in organic light emitting diodes employingordered microlens arrays S. Möller and S. R. Forrest J. of Applied Physics, 91 p.3324-3327 (2002)

  5. Mold transfer process Si mold was etched in HNO3+CH3COOH+HF used Si3N4 layer as a mask PDMS microlens array fabricated from the mold

  6. Paper printout Lens sheet covered OLED with lens sheet covered Image blurring due to the thickness Covered area is brighter

  7. A novel method to fabricate gapless hexagonal micro-lens array M.C. Chou, C.T. Pan, S.C. Shen, M.-F. Chen, K.L. Lin, and S.T. Wu Sensors and Actuators A, 118, p298-306 (2005)

  8. Si Reflow process of AZ4620 thick PR for fabricating half-spherical column Ni as seed layer Electroplate Ni-Co mold CMP Hot embossing PMMA

  9. 90% 45% 95% 100% Different shape with different fill factor Distribution reflowing to form gapless hexagonal lens

  10. Sequence of Ni-Co electroplating process Different gapless lens form by different distributions

  11. Laser passes through hot-embossed PMMA-based gapless hexagonal micro-lens.

  12. Microlens array film with full fill factor for enhancing outcoupling efficiency from OLED lighting Hyouk Kwon, Youngjoo Yee, Chi-Hwan Jeong1, Hyo-Jin Nam, Ki-Won Park, Gun-Woo Lee, and Jong-Uk Bu uTAS proceeding, 2EK5P, p1091-1094 (2007)

  13. Micro Lens Array provide brightness increasing Higher fill factor, higher efficiency

  14. Trench structure keep lens’ shape closing to half-spherical Conformal coating process decrease the height of lens Outcoupling efficiency according to the sag ratio Applying trench to keep higher sag height

  15. MLA is made by UV stamping on transparent PET film

  16. 31.3% improvement

  17. OLED with MLA looked brighter

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