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Semiconductors Material, Components, and Manufacture

Semiconductors Material, Components, and Manufacture. Joseph Stith February 2007. Outline. Atom Electron Energy Levels Electrical properties of materials Doping Diodes Capacitors Transistors High-K dielectric / Metal Gate Flash Transistor Manufacturing Process

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Semiconductors Material, Components, and Manufacture

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  1. SemiconductorsMaterial, Components, and Manufacture Joseph Stith February 2007 Stith

  2. Outline • Atom Electron Energy Levels • Electrical properties of materials • Doping • Diodes • Capacitors • Transistors • High-K dielectric / Metal Gate • Flash Transistor • Manufacturing Process • Semiconductor Mfg History • Possible Futures • Intel Arizona Fabs Stith

  3. Electron Energy Levels • Electrons collect in various regions, often referred to as Energy Levels, shells, orbitals, etc. Drawn representatively as circles. • Atoms seek stability: Full energy Levels: 2, 8, 8, … • How many electrons does this Silicon atom seek? • 4 • Where does it get the additional electrons? • Sharing outer shell electrons with other atoms that also want additional electrons, creating a bond. H20 NaCl SiO2 Stith

  4. Electrical Properties • Insulator • No free electrons • Conductor • free electrons • Semi-Conductor • No free electrons • Insulator • But… Stith

  5. Doping • Increases conductivity • N-Type (5 outer electrons) • Phosphorus or Arsenic • P-Type (3 outer electrons) • Boron Stith

  6. Diode • P-Doped and N-Doped Regions • Both regions are conductors • Junction may not be a conductor Holes & Electrons flowing Depletion Region Positively Biased Stable Covalent Electrons Depletion Region Negatively Biased Holes Electrons Holes Electrons Stith

  7. Capacitor - + - + - • Two conductors separated by an insulator • Plates charge, but no current flows through the capacitor. • Once charged, there is an electrical field between the plates. • Discharging one plate (e.g., attaching to ground) will still leave an electrical field. • Electrical field will attract opposite particles in other plate. - - + - + Stith

  8. Transistor N P N • With no gate charge, no current. • Two reversed diodes • One capacitor • With a positive gate charge, a channel of negative ions form at the top of the P region, allowing current to flow. Stith

  9. High-k + Metal Gate Stith

  10. Flash Transistor • Flash memory still uses MOS Transistors for control functions. • Uses Flash transistors to store data • Floating Gate surrounded by insulator Stith

  11. Manufacturing Process • Fab • Add material • Implant • Diffusion/Anneal • Heat raises energy of atoms to allow them to settle to a more stable location. • Thin Films • Sputter, Oxidation, Chemical Vapor Deposition • Remove material • Etch (chemical; acids): Wet (undercuts), Plasma (straight). • Planar (mechanical) • Determining the pattern/Lithography • Spin on a layer of Resist • Expose to light through pattern (negative) • Wash off the unexposed resist • Add material (below) • Wash off the exposed resist • Metrology (lot OOC, Tool OOC, Trending to OOC) • C4 • Sort • Assembly/Test Stith

  12. 1. Layer SiO2 2. Apply Resist 3. Expose Resist 4. Remove unexposed 5. Etch SiO2 5. Remove exposed 6. Layer Polysilicon gate 7. Apply Resist 8. Expose Resist 9. Remove unexposed 10. Etch Polysilicon 11. Remove exposed 12. Dope Silicon 13. Add SiO2 14. Apply Resist 15. Expose Resist 16. Remove unexposed 17. Etch SiO2 18. Remove exposed 19. Layer Aluminum 20. Apply Resist 21. Expose Resist 22. Remove unexposed 23. Etch Aluminum 24. Remove exposed Manufacturing a Transistor Gate Contact • http://micro.magnet.fsu.edu/electromag/java/transistor/index.html • http://www.tel.com/eng/product/spe/spe.htm METROLOGY Source Contact Drain Contact Stith

  13. History Stith

  14. Stith

  15. Possible Futures Stith

  16. Possible Futures Stith

  17. Future: Multi-Core - Polaris • http://blogs.zdnet.com/OverTheHorizon/?p=12 Stith

  18. Intel Arizona • Chandler Blvd • Offices • Assembly Test development area • Ocotillo • F22 – 8” Fab - Closing Q1 2008, F32 will grow into the floorspace as it transitions to 32nm • F12 – 12” Fab – Running 65nm – Converted from 200mm - Converting to chipset fab. • F32 – 12” Fab – Startup 45nm - $3B - 184,000 square feet of clean room space Stith

  19. Questions? Stith

  20. Backup Stith

  21. Further Info • http://micro.magnet.fsu.edu/electromag/java/siliconcreature/sailboat.html • http://micro.magnet.fsu.edu/electromag/java/transistor/index.html • http://nobelprize.org/educational_games/physics/transistor/function/index.html Stith

  22. Contamination • Class 1 clean room • 10,000 times cleaner than an operating room. • 1 particle (> .5 micron) per cubic foot of air. • FOUPs • Allow for dirtier fabs • Environment • 72 degrees Fahrenheit • 40% humidity • Positive air pressure • Assembly/Test less strict Not Allowed: Gum, perfume, makeup, pencils, standard paper Stith

  23. Electrons Stith

  24. http://winter.group.shef.ac.uk/orbitron/AOs/3d/index.html Stith

  25. http://www.webelements.com/webelements/elements/text/Si/econ.htmlhttp://www.webelements.com/webelements/elements/text/Si/econ.html Stith

  26. References • http://computer.howstuffworks.com • http://www.chemguide.co.uk/atoms/properties/atomorbs.html#top • http://www.chemguide.co.uk/index.html#top • www.webelements.com • http://www.chemguide.co.uk/atoms/bonding/covalent.html • www.sela.com/cmossem.htm • http://cache-www.intel.com/cd/00/00/33/04/330432_330432.pdf • http://en.wikipedia.org/wiki/High-k_Dielectric Stith

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